High quality-factor optical nanocavities in bulk single-crystal diamond

Burek, Michael J.; Chu, Yiwen; Liddy, Madelaine S. Z.; Patel, Parth; Rochman, Jake; Meesala, Srujan; Hong, Won‐Kee; Quan, Qimin; Lukin, Mikhail D.; Lončar, Marko

doi:10.1038/ncomms6718

Cited by 235 publications

(235 citation statements)

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“…The ability to fabricate in 3D deep within the bulk and interface with optical fiber represents significant advantages for a range of integrated optics. However, values for the propagation loss are currently relatively high in comparison to those that can be achieved for surface nanobeam waveguiding structures 15 . The propagation loss can be attributed to scattering and absorption from the sp 2 bonded carbon within the laser written tracks.…”

Section: Arxiv:160600170v2 [Physicsoptics] 28 Jul 2016mentioning

confidence: 99%

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Inscription of 3D waveguides in diamond using an ultrafast laser

Courvoisier

Booth

Salter

2016

Applied Physics Letters

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Three dimensional waveguides within the bulk of diamond are manufactured using ultrafast laser fabrication. High intensities within the focal volume of the laser cause breakdown of the diamond into a graphitic phase leading to a stress induced refractive index change in neighboring regions. Type II waveguiding is thus enabled between two adjacent graphitic tracks, but supporting just a single polarization state. We show that adaptive aberration correction during the laser processing allows the controlled fabrication of more complex structures beneath the surface of the diamond which can be used for 3D waveguide splitters and Type III waveguides which support both polarizations.Diamond has long found use as a material with extreme mechanical properties, and is now rapidly gaining interest for photonic applications 1 . High transmission over a very large spectral window and a high refractive index are attractive for light manipulation. Diamond also acts as a stable basis for a host of color centers which are promising for quantum enhanced technologies 2,3 . The nitrogen vacancy (NV) center is proving particularly useful not just for quantum processing 4 but, also for a range of sensors with extreme sensitivity to magnetic field and temperature 5-7 . The strong Raman coefficient is effective for Raman lasers generating low cost lasing solutions at unusual wavelengths 8,9 . The high Raman coefficient is also useful for implementing solid state quantum memories, a vital component for any quantum optical technology enabling the storage and retrieval of quantum information 10 . In addition, diamond serves as an ideal platform for biophotonics due to a high level of biocompatibility 11 . The efficiency of many of these technologies would be improved by the ability to confine and route light using a network of optical waveguides 12 .Previous demonstrations of waveguiding within diamond have been based upon the principle of selectively removing regions of diamond to generate an air-diamond interface.Surface RIB waveguides have previously been fabricated using reactive ion etching (RIE) with photolithographic patterning 13,14 . Elegant nanobeam waveguides have recently been demonstrated through either angled 15 or undercut RIE etching 16 . Alternatively, direct ion microbeam writing has been used to create shallow subsurface multimode waveguides 17 . All of these approaches are constrained to the diamond surface, require extensive material processing to the potential detriment of the diamond and are difficult to interface with optical fibers. However, a different method for generating guiding structures in crystals has emerged over the past decade, whereby an ultrashort pulsed laser is used to modify the material 18 . In the majority of implementations, light is confined in regions of stress neighboring laser induced damage tracks, which is designated as waveguide based upon a Type II modification 19 . Previously this has been successfully applied to a range of crystals such as lithium niobate 20,21 , KDP 22 , KTP 23 and T...

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Section: Arxiv:160600170v2 [Physicsoptics] 28 Jul 2016mentioning

confidence: 99%

“…Elegant nanobeam waveguides have recently been demonstrated through either angled 15 or undercut RIE etching 16 . Alternatively, direct ion microbeam writing has been used to create shallow subsurface multimode waveguides 17 .…”

mentioning

confidence: 99%

Inscription of 3D waveguides in diamond using an ultrafast laser

Courvoisier

Booth

Salter

2016

Applied Physics Letters

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“…Successful bulk-diamond fabrication approaches demonstrated prior to this work include focused ion-beam milling 31,32 and Faraday cage angled plasma etching. 33,34 The approach demonstrated here, outlined in Figure 1, panel a and inspired by the SCREAM technique for creating structures from single crystal silicon, 35 defines monolithic microdisks such as those shown in Figure 1, panels b and c from bulk diamond. This scalable technique relies upon undercutting of diamond with inductively coupled plasma reactive-ion etching (ICPRIE) along diamond crystal planes using a zero bias oxygen plasma.…”

mentioning

confidence: 99%

High-Q/V Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching

et al. 2015

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READ THESE TERMS AND CONDITIONS CAREFULLY BEFORE USING THIS WEBSITE.http://nparc.cisti-icist.nrc-cnrc.gc.ca/eng/copyright Vous avez des questions? Nous pouvons vous aider. Pour communiquer directement avec un auteur, consultez la première page de la revue dans laquelle son article a été publié afin de trouver ses coordonnées. Si vous n'arrivez pas à les repérer, communiquez avec nous à PublicationsArchive-ArchivesPublications@nrc-cnrc.gc.ca. Questions? Contact the NRC Publications Archive team atPublicationsArchive-ArchivesPublications@nrc-cnrc.gc.ca. If you wish to email the authors directly, please see the first page of the publication for their contact information. NRC Publications Archive Archives des publications du CNRCThis publication could be one of several versions: author's original, accepted manuscript or the publisher's version. / La version de cette publication peut être l'une des suivantes : la version prépublication de l'auteur, la version acceptée du manuscrit ou la version de l'éditeur. For the publisher's version, please access the DOI link below./ Pour consulter la version de l'éditeur, utilisez le lien DOI ci-dessous.http://doi.org/10.1021/acs.nanolett.5b01346Access and use of this website and the material on it are subject to the Terms and Conditions set forth at High-Q/V monolithic diamond microdisks fabricated with quasiisotropic etching Khanaliloo, Behzad; Mitchell, Matthew; Hryciw, Aaron C.; Barclay, Paul E. NRC Publications Record / Notice d'Archives des publications de CNRC:http://nparc.cisti-icist.nrc-cnrc.gc.ca/eng/view/object/?id=65852c4c-ce37-4aff-a42f-101c402dccf7 http://nparc.cisti-icist.nrc-cnrc.gc.ca/fra/voir/objet/?id=65852c4c-ce37-4aff-a42f-101c402dccf7 High-Q/V Monolithic Diamond Microdisks Fabricated with Quasiisotropic EtchingBehzad Khanaliloo, †, ‡ Matthew Mitchell, †, ‡ Aaron C. Hryciw, ‡, § and Paul E. Barclay* , †, ‡ † Department of Physics and Astronomy and Institute for Quantum Science and Technology, University of Calgary, Calgary, AB T2N 1N4, Canada ‡ National Institute for Nanotechnology, 11421 Saskatchewan Drive Northwest, Edmonton, AB T6G 2M9, Canada § nanoFAB Facility, University of Alberta, Edmonton, AB T6G 2R3, Canada ABSTRACT: Optical microcavities enhance light−matter interactions and are essential for many experiments in solid state quantum optics, optomechanics, and nonlinear optics. Single crystal diamond microcavities are particularly sought after for applications involving diamond quantum emitters, such as nitrogen vacancy centers, and for experiments that benefit from diamond's excellent optical and mechanical properties. Light−matter coupling rates in experiments involving microcavities typically scale with Q/V, where Q and V are the microcavity quality-factor and mode-volume, respectively. Here we demonstrate that microdisk whispering gallery mode cavities with high Q/V can be fabricated directly from bulk single crystal diamond. By using a quasi-isotropic oxygen plasma to etch along diamond crystal planes and undercut passivated diamond structures...

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“…In Figure 4, we show scanning electron microscopic images and details of nanophotonics components fabricated in single crystal diamond 10,50,[53][54][55] . Among the optical resonators described in the following sections, we show those currently achieving the highest Q s at specific wavelengths in the near infrared and in the visible spectrum at around 637 nm.…”

Section: Nanophotonics Componentsmentioning

confidence: 99%

“…Furthermore, nanofabrication has led to photonic components in diamond, such as waveguides, photonic crystals (PHC) and optical nanoresonators, to advance light manipulation, propagation and confinement [8][9][10] , while their combination with mechanical modes can advance cavity optomechanics 11,12 . Another important feature in diamond is the harboring of isolated atomic color centers that can be used as fluorescent and spin probes for single molecule detection and imaging as well as for fundamental investigation into quantum science.…”

Section: Introductionmentioning

confidence: 99%

Advances in diamond nanofabrication for ultrasensitive devices

Castelletto

Rosa

Blackledge³

et al. 2017

Microsyst Nanoeng

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This paper reviews some of the major recent advances in single-crystal diamond nanofabrication and its impact in nano-and micromechanical, nanophotonics and optomechanical components. These constituents of integrated devices incorporating specific dopants in the material provide the capacity to enhance the sensitivity in detecting mass and forces as well as magnetic field down to quantum mechanical limits and will lead pioneering innovations in ultrasensitive sensing and precision measurements in the realm of the medical sciences, quantum sciences and related technologies. INTRODUCTIONDiamond is an ideal platform for nano-and microfabrication leading to a range of robust sensors. This is due to the outstanding mechanical and wide spectral optical transparency of diamond, combined with biocompatibility and lack of toxicity in both bulk and nanostructures. Moreover, diamond can be fabricated with high purity and control using chemical vapor deposition. However, due to its hardness and cost, some of its applications in nanomechanics, optomechanics and nanophotonics reside mainly in its polycrystalline or nanocrystalline forms, which do not always retain the nuance of the outstanding properties of monocrystalline diamond.A recent review 1 describes diamond optical and mechanical properties compared to other materials currently used for optomechanical components (Si, Si 3 N 4 , SiC, and α-Al 2 O 3 ), showing that, in principle, there are more favorable properties of diamond for nanomechanical and optomechanical realizations. Therefore, a considerable effort has been taking place over the last five years to exploit these properties in a wide spectrum of diamond nanosystems. To date, single crystal diamond utilization for nanomechanical components 2 , (for example, nano electromechanical systems (NEMS) and micro electro-mechanical systems (MEMS)), as well for nanophotonics 3,4 compared to above mentioned materials, has been limited due to its growth requirements. In fact, a single crystal diamond cannot be grown on any other substrate than itself. This prevents wafer-scale processing and it represents a challenge in the application of conventional diamond nanofabrication methods. On the other hand, polycrystalline diamond films, which can be grown in high quality from 4 to 6 inches' wafers 5 , permit to fabricate optomechanical components with quality factors and oscillation frequencies rivaling single crystal diamond 6 .

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High quality-factor optical nanocavities in bulk single-crystal diamond

Cited by 235 publications

References 49 publications

Inscription of 3D waveguides in diamond using an ultrafast laser

Inscription of 3D waveguides in diamond using an ultrafast laser

High-Q/V Monolithic Diamond Microdisks Fabricated with Quasi-isotropic Etching

Advances in diamond nanofabrication for ultrasensitive devices

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