High-resistivity and high-TCR vanadium oxide thin films for infrared imaging prepared by bias target ion-beam deposition

Jin, Yao; Basantani, Hitesh A.; Özçelik, Adem; Jackson, T. N.; Horn, Mark W.

doi:10.1117/12.2016277

Cited by 10 publications

(5 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…To realize wavelength-free photodetection, photothermal effects (photothermal-electric effect, bolometric effect) become the main option for uncooled IR detectors. Metal oxides with large temperature coefficient resistance (TCR) have been considered promising uncooled LWIR photodetectors, such as MoO x and NiO x thin films, [13] VO 2 , [14,15] Bi 2 O 2 Se, [16] and Fe 4 O 3 , [17] which exhibit TCRs ranging from −1.5%K −1 -−4.5%K −1 . Recently, iron oxides, especially hematite (𝛼-Fe 2 O 3 ), have attracted a large number of researchers' interest due to their fascinating properties; they are abundant, have a high light absorptivity (≈10 4 cm −1 ) in the visible region, [18,19] and they are nontoxic and biodegradable, and these characteristics have been exploited in many important applications, such as gas sensors, [20,21] efficient photocatalysts for water splitting, electrode materials, [22] Li-ion batteries, [23,24] and supercapacitors.…”

Section: Doi: 101002/adom202300382mentioning

confidence: 99%

Highly Sensitive Long‐Wave Infrared Photodetector Based on Two‐Dimensional Hematite α‐Fe₂O₃

Wang

Liu

Cao

et al. 2023

Advanced Optical Materials

View full text Add to dashboard Cite

Ambient temperature long‐wavelength infrared (LWIR) photodetection has many critical applications ranging from thermal imaging and optical communications to night vision cameras. Currently, high performance, low cost, air stability, and ultra‐broadband response still constitute challenges. Here, the study demonstrates a high‐performance uncooled LWIR photodetector using 2D hexagonal α‐Fe2O3 single crystal nanoflakes, which are synthesized via chemical vapor deposition. The 2D α‐Fe2O3 photodetector realizes high specific detectivity (D*) of 3.28×109 cmHz1/2 W−1 and very low noise equivalent power of 8.94×10−14 W Hz−1/2 with 10.6 µm laser. The photo bolometer effect is responsible for the photoresponse in the infrared range with a large temperature coefficient resistance of −241.2% K−1. This study shows a new type of potential broadband response material and provides a promising LWIR optoelectrical device with good air stability.

show abstract

Section: Doi: 101002/adom202300382mentioning

confidence: 99%

Highly Sensitive Long‐Wave Infrared Photodetector Based on Two‐Dimensional Hematite α‐Fe₂O₃

Wang

Liu

Cao

et al. 2023

Advanced Optical Materials

View full text Add to dashboard Cite

show abstract

“…The development of the pressure sensor based on thin films requires the need of a certain type of material which exhibits long term stability, good sensitivity, linearity and a strong resistance against the atmospheric reactions that acts upon it [11,16]. The material commonly being utilized in the thin film strain gauges include alloys, cermets, metals, polymers and semiconductors [12,17]. The current research involving an inorganic compound nanomaterial as the strain gauge is a new adventure in meeting the latest trends.…”

Section: Introductionmentioning

confidence: 99%

Green synthesis of vanadium oxide nanoparticles for thin film based sensor application

Chand¹,

Kalpana²,

Lalithamba

2022

IOP Conf. Ser.: Mater. Sci. Eng.

View full text Add to dashboard Cite

A high yield of single phase orthorhombic vanadium oxide (V2O5) nanoparticles with solution combustion method is obtained in a very quick succession at 500 °C, by the utilization of Butea monosperma seed extract, to study its suitability towards pressure sensors. The Structural, Transmission spectral, Morphological, Compositional and the Absorption spectral analysis of the deposited vanadium oxide nanoparticle samples are examined using X-Ray diffraction (XRD), Fourier transform infrared spectroscopy (FTIR), Scanning electron microscope (SEM), High resolution transmission electron microscope (HRTEM), Energy dispersive X-Ray analysis (EDX) and Ultraviolet–visible spectroscopy (UV) respectively. The results from the structural analysis denote the nanoparticles with the crystallite size of 4.76 Å, dislocation density of 441.35*1016/m2 along with the micro strain of 76.0366*10-3. Infrared transmission spectral images clearly display three strong peaks at 1633.76 cm-1, 1070.80 cm-1 and 537.25 cm-1, stating the presence of a strong and stable vanadyl bonding structure. Images from its morphological analysis depict the nanoparticles are homogeneously porous without any cracks on its surface. The composition of the nanoparticles clearly displays the presence of vanadium and oxygen atoms in a strong bonding structure. Absorption spectral results showed that the obtained samples after synthesis are in nano size with narrow size distribution. The results obtained from the experimental analysis indicate a stable performance, good linearity and stability, indicating its suitability for pressure sensing application.

show abstract

“…Another effective way is using better thermal-sensitive materials [2]. As a widely used thermal-sensitive material, VO x with a relatively low resistivity in the range of 0.1-5.0 Ω•cm has a TCR of about 2%/°C at room temperature [3]. Considering that the sensitivity of a microbolometer is proportional to the TCR, it is more favorable to use thermalsensitive materials with higher TCR for increasing the sensitivity of small pixel microbolometers.…”

Section: Introductionmentioning

confidence: 99%

“…Considering that the sensitivity of a microbolometer is proportional to the TCR, it is more favorable to use thermalsensitive materials with higher TCR for increasing the sensitivity of small pixel microbolometers. In order to increase the TCR of VO x films, Jin et al prepared Modoped VO x thin films by bias target ion beam deposition [3]. The films have a high TCR of − 4.5%/°C, but large resistivity (> 1000 Ω•cm) is not preferable for microbolometer applications.…”

Section: Introductionmentioning

confidence: 99%

“…Generally, high preparation temperature contributes to denser passivation layer [5,6], thus better protection effect for VO x thin films. However, VO x thermal-sensitive thin films, which are generally prepared at relatively low temperature (lower than 300°C), are amorphous [3,7,8]. Whereas amorphous VO x tends to crystallize at elevated temperature [9].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A Monoclinic V1-x-yTixRuyO2 Thin Film with Enhanced Thermal-Sensitive Performance

et al. 2020

Nanoscale Res Lett

View full text Add to dashboard Cite

Preparing the thermal-sensitive thin films with high temperature coefficient of resistance (TCR) and low resistivity by a highly compatible process is favorable for increasing the sensitivity of microbolometers with small pixels. Here, we report an effective and process-compatible approach for preparing V 1-x-y Ti x Ru y O 2 thermal-sensitive thin films with monoclinic structure, high TCR, and low resistivity through a reactive sputtering process followed by annealing in oxygen atmosphere at 400°C. X-ray photoelectron spectroscopy demonstrates that Ti 4+ and Ru 4+ ions are combined into VO 2. X-ray diffraction, Raman spectroscopy, and transmission electron microscopy reveal that V 1-x-y Ti x Ru y O 2 thin films have a monoclinic lattice structure as undoped VO 2. But V 1-x-y Ti x Ru y O 2 thin films exhibit no-SMT feature from room temperature (RT) to 106°C due to the pinning effect of high-concentration Ti in monoclinic lattice. Moreover, RT resistivity of the V 0.8163 Ti 0.165 Ru 0.0187 O 2 thin film is only one-eighth of undoped VO 2 thin film, and its TCR is as high as 3.47%/°C.

show abstract

High-resistivity and high-TCR vanadium oxide thin films for infrared imaging prepared by bias target ion-beam deposition

Cited by 10 publications

References 14 publications

Highly Sensitive Long‐Wave Infrared Photodetector Based on Two‐Dimensional Hematite α‐Fe₂O₃

Highly Sensitive Long‐Wave Infrared Photodetector Based on Two‐Dimensional Hematite α‐Fe₂O₃

Green synthesis of vanadium oxide nanoparticles for thin film based sensor application

A Monoclinic V1-x-yTixRuyO2 Thin Film with Enhanced Thermal-Sensitive Performance

Contact Info

Product

Resources

About

High-resistivity and high-TCR vanadium oxide thin films for infrared imaging prepared by bias target ion-beam deposition

Cited by 10 publications

References 14 publications

Highly Sensitive Long‐Wave Infrared Photodetector Based on Two‐Dimensional Hematite α‐Fe2O3

Highly Sensitive Long‐Wave Infrared Photodetector Based on Two‐Dimensional Hematite α‐Fe2O3

Green synthesis of vanadium oxide nanoparticles for thin film based sensor application

A Monoclinic V1-x-yTixRuyO2 Thin Film with Enhanced Thermal-Sensitive Performance

Contact Info

Product

Resources

About

Highly Sensitive Long‐Wave Infrared Photodetector Based on Two‐Dimensional Hematite α‐Fe₂O₃

Highly Sensitive Long‐Wave Infrared Photodetector Based on Two‐Dimensional Hematite α‐Fe₂O₃