High resolution micro ultrasonic machining (HR-&amp;#x03BC;USM) for post-fabrication trimming of fused silica 3-D microstructures

Viswanath, Anupam; Li, Tao; Gianchandani, Yogesh B.

doi:10.1109/memsys.2014.6765685

Cited by 13 publications

(3 citation statements)

References 9 publications

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“…Regarding mass-removing trimming, Viswanath et al proposed a high-resolution micro-ultrasonic machining (HR-µUSM) process, which is used for the post-processing trimming of complex 3D microstructures that are made of fused silica. The HR-µUSM process achieves the mass removal of the sub-nanometer surface [12]. Hu et al determined the processing parameters of etched holes via finite element simulation and applied a femtosecond laser to manufacturing holes.…”

Section: Introductionmentioning

confidence: 99%

Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope

Wang,

Wu,

Wang

et al. 2023

Micromachines

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The MEMS gyroscope is one of the basic units of inertial navigation, whose performance and accuracy is noteworthy. Because of the limitations of processing technology and other factors, the relative manufacturing error of MEMS gyroscopes is usually large. Errors directly lead to a frequency mismatch of resonant structures and consequently restrict the performance improvement of the gyroscope. This study proposes a mechanical trimming technique combining the addition and removal of gold in a ring MEMS gyroscope. Firstly, the analysis of the gyroscope dynamics and error model and trimming theory provides theoretical guidance for the trimming process. Secondly, the method of adjusting the mass is investigated, and the ablation threshold of femtosecond laser parameters on gold is analyzed, which provides the process with parameters for the trimming experiment. Finally, the frequency trimming process is conducted in three steps, including the addition of gold spheres and the removal of gold spheres and gold film, which are applicable to the trimming process at different rates of frequency split. The results shows that the proposed method can reduce the frequency split of the gyroscope from 4.36 to 0.017 Hz.

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Section: Introductionmentioning

confidence: 99%

Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope

Wang,

Wu,

Wang

et al. 2023

Micromachines

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“…Mechanical and electric ways have been utilized to match the driving and sensing modes. The mechanical way is to change the distribution of mass or the stiffness of the resonator [15]- [18]. The electric way is to apply electrostatic forces with dedicated electrodes to locally reduce the resonator stiffness [19], [20].…”

Section: Introductionmentioning

confidence: 99%

Design of a Disk Resonator Gyroscope With High Mechanical Sensitivity by Optimizing the Ring Thickness Distribution

Xiao

Zhou

et al. 2016

J. Microelectromech. Syst.

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In this paper, we present the mechanical sensitivity improvement of a disk resonator gyroscope (DRG) by optimizing the thickness distribution of the nested rings. The mechanical sensitivities of the DRGs with uniform, linearly changing, and step changing rings have been simulated. The results suggest that the ring thickness distribution has great influence on the performance of the DRG. Then, the optimized ring thickness distribution was obtained by using the traditional method of moving asymptotes (MMA), which result in a 24% improvement of the mechanical sensitivity. Finally, the bio-inspired particle swarm optimization (PSO) algorithm has also been used. The optimization results of PSO coincide well with that of MMA, and the optimized result is the global optimum. Meanwhile, the optimized distribution rules can be used on the series of DRGs and the optimization methods can be widely used on other microelectromechanical systems (MEMS) devices. [2015-0310]Index Terms-Disk resonator gyroscope, ring thickness distribution, structure optimization, method of moving asymptotes, particle swarm optimization.

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“…The discussion and conclusions are provided in section 4. 1 Portions of this paper appear in conference abstract form in [24]. [26].…”

Section: Introductionmentioning

confidence: 99%

High resolution micro ultrasonic machining for trimming 3D microstructures

Viswanath¹,

Li²,

Gianchandani³

2014

J. Micromech. Microeng.

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This paper reports on the evaluation of a high resolution micro ultrasonic machining (HR-μUSM) process suitable for post fabrication trimming of complex 3D microstructures made from fused silica. Unlike conventional USM, the HR-μUSM process aims for low machining rates, providing high resolution and high surface quality. The machining rate is reduced by keeping the micro-tool tip at a fixed distance from the workpiece and vibrating it at a small amplitude. The surface roughness is improved by an appropriate selection of abrasive particles. Fluidic modeling is performed to study interaction among the vibrating micro-tool tip, workpiece, and the slurry. Using 304 stainless steel (SS304) tool tips of 50 μm diameter, the machining performance of the HR-μUSM process is characterized on flat fused silica substrates. The depths and surface finish of machined features are evaluated as functions of slurry concentrations, separation between the micro-tool and workpiece, and machining time. Under the selected conditions, the HR-μUSM process achieves machining rates as low as 10 nm s −1 averaged over the first minute of machining of a flat virgin sample. This corresponds to a mass removal rate of ≈20 ng min −1. The average surface roughness, S a , achieved is as low as 30 nm. Analytical and numerical modeling are used to explain the typical profile of the machined features as well as machining rates. The process is used to demonstrate trimming of hemispherical 3D shells made of fused silica.

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High resolution micro ultrasonic machining (HR-μUSM) for post-fabrication trimming of fused silica 3-D microstructures

Cited by 13 publications

References 9 publications

Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope

Research on the Mass Adding and Removing Combined Mechanical Trimming Method of the Ring MEMS Gyroscope

Design of a Disk Resonator Gyroscope With High Mechanical Sensitivity by Optimizing the Ring Thickness Distribution

High resolution micro ultrasonic machining for trimming 3D microstructures

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