2021 46th International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz) 2021
DOI: 10.1109/irmmw-thz50926.2021.9567363
|View full text |Cite
|
Sign up to set email alerts
|

High-resolution Terahertz near-field reflection measurements for complementary non-destructive inspection of integrated circuits

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
3
1

Relationship

2
2

Authors

Journals

citations
Cited by 4 publications
(2 citation statements)
references
References 2 publications
0
2
0
Order By: Relevance
“…27 In this paper, a TeraCube Scientific THz near-field scanning system is used to collect the THz-TDS signal from the IC samples. 28 This system utilizes photoconductive antennas (PCAs) to both generate and detect broadband THz pulses. Figure .2 shows a schematic of this system.…”
Section: Near-field Thz-tds For Ic Packaging Characterizationmentioning
confidence: 99%
“…27 In this paper, a TeraCube Scientific THz near-field scanning system is used to collect the THz-TDS signal from the IC samples. 28 This system utilizes photoconductive antennas (PCAs) to both generate and detect broadband THz pulses. Figure .2 shows a schematic of this system.…”
Section: Near-field Thz-tds For Ic Packaging Characterizationmentioning
confidence: 99%
“…Additionally, the application of a deconvolution algorithm significantly enhances signal processing. 26 This not only denoises the signal but also aids in more easily and clearly identifying the time delay of the signal, leading to more accurate thickness characterization.The ability to measure the thickness of buried samples has allowed this method to generate unique IDs for tracking and tracing purposes. 27 Decoupling the thickness and refractive index of the THz-TDS thickness characterization has also emerged as a attractive area of research.…”
Section: Materials and Structure Measurementmentioning
confidence: 99%