A chip inductor based on the CoTi-substituted hexa ferrite BaFe 12 O 19 was designed by LTCC technology to realize the 0805 size of standard packaging and high frequency applications. Testing results show that the value of inductor is 2.45 µH and cut-off frequency is 508 MHz. And the measured results agree with the simulated data basically, which indicates that the samples can satisfy the need of high frequency inductors. The influences of each factor on the performances of inductor were also analyzed. It is an effective method to resolve the consistency problems between simulation and manufacture.
IntroductionBecause of the rapid progress in the developments of wireless and mobile technology, further miniaturized inductor operating on higher frequencies are in great demand to fabricate high-density integrated devices. It is generally accepted that low-temperature Co-fired Ceramics and Ferrites (LTCC<CF) technology can satisfy such requirements. In addition, it also can be applied to manufacture other passive components , for example, resistors and capacitors. Thus, Nowadays LTCC is becoming the major technology for components integration [1][2].Recently, M-type barium ferrite (BaFe 12 O 19 ) has been found extensive applications in the fields of permanent magnets, wave-adsorbing, high-density magnetic recording and microwave devices. As the sintering temperature for the material is always higher than 1000ºC and could not be satisfied with chip components manufacturing technology, low-temperature co-fired ceramics and ferrites process, the problems of how to realize the low-temperature firing and multifunction of barium ferrite are becoming the key technologies for the adaption to the developments of electronic components to the directions of subminiaturization, greater multifunctionality and excellent reliability [3][4][5].In this paper, an embedded helix-type LTCC inductor prepared by Co-Ti substituted M-type Barium ferrite for high frequencies applications is described in details. Firstly, The influences of the Co-Ti substitution on the magnetic and electronic performances of barium ferrites are included, in order to find the optimal parameters for LTCC inductor fabrication. Secondly, according to the stimulation results of the inductor used in high frequency by the aid of HFSS software, the structure and the related size of the inductor are confirmed. Thirdly, a helix-type LTCC inductor with the 0805 size was successfully fabricated. Testing results show that the value of inductor is 2.45uH and cut-off frequency is 508MHz. The measured results agree with the simulated data