2010
DOI: 10.1109/ted.2009.2037461
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High-Speed and High-Reliability InP-Based HBTs With a Novel Emitter

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Cited by 34 publications
(18 citation statements)
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“…We confirmed lifetime of over 1 x 10 8 h for InP HBTs for 40-Gbit/s ICs with passivation ledge structures [3] and with refractory emitter electrodes [4]. On the other hand, we have also developed reliable InP HBTs with high-frequency performance up to f t and f max of over 300 GHz [5,6,7]. These devices have sub-micrometer dimensions aiming high-speed and low-power operation of over-100-Gbit/s ICs.…”
Section: Introductionmentioning
confidence: 65%
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“…We confirmed lifetime of over 1 x 10 8 h for InP HBTs for 40-Gbit/s ICs with passivation ledge structures [3] and with refractory emitter electrodes [4]. On the other hand, we have also developed reliable InP HBTs with high-frequency performance up to f t and f max of over 300 GHz [5,6,7]. These devices have sub-micrometer dimensions aiming high-speed and low-power operation of over-100-Gbit/s ICs.…”
Section: Introductionmentioning
confidence: 65%
“…Next, dry etching is performed to form the emitter mesa structure. The emitter layer is used as a ledge layer whose thickness is 15 nm [7]. The surface of the ledge layer is covered with SiN films for passivation [6].…”
Section: Methodsmentioning
confidence: 99%
“…The driver IC was fabricated using InP HBT technology [6,7]. To reduce the module size, we designed the two-channel driver IC with a fully lumped configuration to save active IC area [8].…”
Section: Driver Modulementioning
confidence: 99%
“…The driver IC was fabricated by using InP HBT technology [4,5], which has excellent high-frequency performance and high breakdown voltage. Fig.…”
Section: Driver Ic Designmentioning
confidence: 99%