High-speed data storage and processing for projection mask-less lithography systems

Voss, Sven-Hendrik; Talmi, M.; Saniter, J.; Eindorf, Juergen; Reisig, Alexander; Heinitz, Joachim; Haugeneder, E.

doi:10.1016/j.mee.2006.01.033

Cited by 6 publications

(2 citation statements)

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“…With 200x reduction these beams are reduced to 12.5 nm at the wafer substrate within an exposure field of 7.5 m × 7.5 m. With resolution potential beyond 10 nm PML2 is designed to meet the requirements of several upcoming integrated circuit (IC) generations. In [8,9], an advantageous optical interconnected technology for transmit exposure data used in PML2 was introduced. A continuous and reliable parallel data transmission over free-space optics at 1 Gbps per channel was achieved based on the introduced system.…”

Section: Introductionmentioning

confidence: 99%

High-Speed Transmission and Mass Data Storage Solutions for Large-Area and Arbitrarily Structured Fabrication through Maskless Lithography

Wang

2016

Journal of Electrical and Computer Engineering

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This paper presents the implementation aspects and design of high-speed data transmission in laser direct-writing lithography. With a single field programmable gate array (FPGA) chip, mass data storage management, transmission, and synchronization of each part in real-time were implemented. To store a massive amount of data and transmit data with high bandwidth, a serial advanced technology attachment (SATA) intellectual property (IP) was developed on Xilinx Virtex-6 FPGA. In addition, control of laser beam power, collection of status read back data of the lithography laser through an analog-to-digital converter, and synchronization of the positioning signal were implemented on the same FPGA. A data structure for each unit with a unique exposure dose and other necessary information was established. Results showed that the maximum read bandwidth (240 MB/s) and maximum write bandwidth (200 MB/s) of a single solid-state drive conform to the data transmission requirement. The total amount of data meets the requirement of a large-area diffractive element approximately 102 cm2. The throughput has been greatly improved at meters per second or square centimeter per second. And test results showed that data transmission meets the requirement of the experiment.

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Section: Introductionmentioning

confidence: 99%

High-Speed Transmission and Mass Data Storage Solutions for Large-Area and Arbitrarily Structured Fabrication through Maskless Lithography

Wang

2016

Journal of Electrical and Computer Engineering

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“…To achieve effective exposure rates the electronics inside an aperture plate system must be provided with a large amount of data in very short intervals [7]. Data compression is an effective technique for saving storage space and transmission bandwidth, but it has also limitations in a sense.…”

Section: Introductionmentioning

confidence: 99%