2020
DOI: 10.1021/acs.jpcc.0c04914
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High-Speed Direct Writing of MoSe2 by Maskless and Gas-Free Laser-Assisted Selenization Process

Abstract: Transition metal dichalcogenides (TMDCs) have shown exceptional optoelectronic properties that can potentially substitute conventional silicon-based devices and be utilized in sensors and energy devices. To exploit their wide array of potential applications, it is necessary to develop methods capable of on demand, location selective, and tunable formation of structures of arbitrary shape. Here, we demonstrated high-speed direct writing of MoSe2 by laser-induced selenization process in vacuum or ambient environ… Show more

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Cited by 4 publications
(9 citation statements)
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“…Besides, direct laser writing can crystallize as-deposited amorphous precursors mixed of dopants and constituents with predetermined molar ratios into doped/alloyed TMDs. [84] This report consolidated several selected recent works concerning the substitutional doping and alloying of 2D TMDs in each thin-film technique. In particular, the substitutional doping techniques have advanced significantly in the past few years and are gradually phasing out the unreliable surface functionalization methods for industrial application.…”
Section: Thin-film Techniques For the Compositional Engineering Of 2d Tmdsmentioning
confidence: 57%
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“…Besides, direct laser writing can crystallize as-deposited amorphous precursors mixed of dopants and constituents with predetermined molar ratios into doped/alloyed TMDs. [84] This report consolidated several selected recent works concerning the substitutional doping and alloying of 2D TMDs in each thin-film technique. In particular, the substitutional doping techniques have advanced significantly in the past few years and are gradually phasing out the unreliable surface functionalization methods for industrial application.…”
Section: Thin-film Techniques For the Compositional Engineering Of 2d Tmdsmentioning
confidence: 57%
“…Laser-assisted photonic crystallization uses amorphous precursors with predetermined molar ratios deposited by e-beam evaporation, [84] magnet-sputtering, [144] and PLD. [145] Rho et al detailed a comprehensive study on direct laser writing of MoSe 2 by laser-assisted selenization process.…”
Section: Laser-assisted Modifications and Growthmentioning
confidence: 99%
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