High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

Schmidt, Jochen; Dauderstaedt, Ulrike; Duerr, Peter; Friedrichs, Martin; Hughes, T.P.; Ludewig, Thomas; Rudloff, D.; Schwaten, Tino; Trenkler, Daniela; Wagner, Michael; Wullinger, Ingo; Bergström, Andreas; Bjoernangen, Peter; Jönsson, Fredrik; Karlin, Tord; Ronnholm, Peter; Sandstrom, Tor

doi:10.1117/12.2036533

Cited by 10 publications

(7 citation statements)

References 3 publications

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“…A hexagonal version of the tilting mirrors as shown in Figure 1 b was developed for a lithography application at 355 nm [ 19 ]. These mirrors have a yoke in the hinge layer so that the electrostatic force acts between the electrode and the yoke instead of the mirror, which gives more freedom in the choice of material for the mirror and the yoke, as well as their design.…”

Section: Types and Applicationsmentioning

confidence: 99%

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Analog Spatial Light Modulators Based on Micromirror Arrays

et al. 2021

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The Fraunhofer Institute for Photonic Microsystems (IPMS) has been developing and manufacturing micromirror arrays for more than 20 years. While originally focusing on applications related to microlithography and therefore mainly for light in the deep ultraviolet range, the range of applications has been expanded since, including applications in the visible and near-infrared range. This paper gives an overview of the devices and their designs, fabrication, and characterization.

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Section: Types and Applicationsmentioning

confidence: 99%

“…A very special case is shown in Figure 7 c. This is a passive device, i.e., one without the CMOS circuit underneath, where 8193 logical pixels have to be connected [ 19 ]. The SLM chip (top center, mirror area underneath a purging cap) is connected to a PCB with four loops of bond wires on top of each other.…”

Section: Fabricationmentioning

confidence: 99%

Analog Spatial Light Modulators Based on Micromirror Arrays

et al. 2021

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“…For high speed 4F accelerators, usually the output sensing will be the performance bottleneck due to the performance gap between high speed SLM and high speed camera. In such systems the inputs are usually generated by high-resolution, high-speed SLM [15][13][12] [16], while the multiplication is carried out using either another SLM or phase mask. The resolution of commercial SLM can scale up to 4K with a nominal operating frequency of 20-30 KHz[12] with several research SLMs going to MHz regime [16].…”

Section: Performance Gap Between Camera and Light Modulatorsmentioning

confidence: 99%

Channel Tiling for Improved Performance and Accuracy of Optical Neural Network Accelerators

Li,

Miscuglio,

Sorger

et al. 2020

Preprint

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Low latency, high throughput inference on Convolution Neural Networks (CNNs) remains a challenge, especially for applications requiring large input or large kernel sizes. 4F optics provides a solution to accelerate CNNs by converting convolutions into Fourier-domain point-wise multiplications that are computationally 'free' in optical domain. However, existing 4F CNN systems suffer from the all-positive sensor readout issue which makes the implementation of a multi-channel, multi-layer CNN not scalable or even impractical.In this paper we propose a simple channel tiling scheme for 4F CNN systems that utilizes the high resolution of 4F system to perform channel summation inherently in optical domain before sensor detection, so the outputs of different channels can be correctly accumulated. Compared to state of the art, channel tiling gives similar accuracy, significantly better robustness to sensing quantization (33% improvement in required sensing precision) error and noise (10dB reduction in tolerable sensing noise), 0.5X total filters required, 10-50X+ throughput improvement and as much as 3X reduction in required output camera resolution/bandwidth. Not requiring any additional optical hardware, proposed channel tiling approach addresses an important throughput and precision bottleneck of high-speed, massively-parallel optical 4F computing systems.

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“…Applications can be found e.g. in deep UV mask writing [1], laser direct imaging [2], and optical microscopy with spatio-angular illumination control [3]. Driven by lithographic applications, there is a permanent need for ever increasing optical performance of MEMS modulators, with primary focus on highest accuracy of the phase modulation.…”

Section: Introductionmentioning

confidence: 99%

Spatially resolved contrast measurement of diffractive micromirror arrays

et al. 2015

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Diffractive micromirror arrays (MMA) are a special class of optical MEMS, serving as spatial light modulators (SLM) that control the phase of reflected light. Since the surface profile is the determining factor for an accurate phase modulation, high-precision topographic characterization techniques are essential to reach highest optical performance. While optical profiling techniques such as white-light interferometry are still considered to be most suitable to this task, the practical limits of interferometric techniques start to become apparent with the current state of optical MEMS technology. Light scatter from structured surfaces carries information about their topography, making scatter techniques a promising alternative. Therefore, a spatially resolved scatter measurement technique, which takes advantage of the MMA’s diffractive principle, has been implemented experimentally. Spectral measurements show very high contrast ratios (up to 10 000 in selected samples), which are consistent with calculations from micromirror roughness parameters obtained by white-light interferometry, and demonstrate a high sensitivity to changes in the surface topography. The technique thus seems promising for the fast and highly sensitive characterization of diffractive MMAs

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High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

Cited by 10 publications

References 3 publications

Analog Spatial Light Modulators Based on Micromirror Arrays

Analog Spatial Light Modulators Based on Micromirror Arrays

Channel Tiling for Improved Performance and Accuracy of Optical Neural Network Accelerators

Spatially resolved contrast measurement of diffractive micromirror arrays

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