Biological cells are characterized by highly complex phenomena and processes that are, to a great extent, interdependent. To gain detailed insights, devices designed to study cellular phenomena need to enable tracking and manipulation of multiple cell parameters in parallel; they have to provide high signal quality and high spatiotemporal resolution. To this end, we have developed a CMOS-based microelectrode array system that integrates six measurement and stimulation functions, the largest number to date. Moreover, the system features the largest active electrode array area to date (4.48×2.43 mm 2 ) to accommodate 59,760 electrodes, while its power consumption, noise characteristics, and spatial resolution (13.5 μm electrode pitch) are comparable to the best state-of-the-art devices. The system includes: 2,048 action-potential (AP, bandwidth: 300 Hz to 10 kHz) recording units, 32 local-field-potential (LFP, bandwidth: 1 Hz to 300 Hz) recording units, 32 current recording units, 32 impedance measurement units, and 28 neurotransmitter detection units, in addition to the 16 dual-mode voltage-only or current/voltagecontrolled stimulation units. The electrode array architecture is based on a switch matrix, which allows for connecting any measurement/stimulation unit to any electrode in the array and for performing different measurement/stimulation functions in parallel.
Index Termshigh-density microelectrode array (HD-MEA); neural interface; multi-functionality; high channel count; low noise; low power; switch matrix; extracellular recording and stimulation; neurotransmitter detection; impedance spectroscopy; pre-charging; pseudo-resistor
I IntroductionElectrogenic cells, such as neuronal, cardiac, and pancreatic cells are capable of generating and transmitting electrical signals. The flow of ions through the cell membrane generates changes in electrical potentials that can be measured using standard electronic circuitry. Apart from electrical signals, cells also use chemical compounds for signaling, as it is the case in neuronal synapses (contacts between neuronal cells). The chemicals that transmit signals across the synaptic cleft, so-called neurotransmitters, play a significant role in brain diseases, such as schizophrenia, Alzheimer's, and Parkinson's disease [1]; their presence is detectable by means of electrochemical methods, typically, cyclic voltammetry, [2]- [4]. To study cell network dynamics, a bidirectional interaction, which also includes electrical stimulation of cells, is desired. To ensure precise and selective stimulation of individual neurons, characterization of the electrodes [5], the cell-electrode attachment, and the cell morphology [6] is first performed, typically by means of impedance spectroscopy [7]. This In this paper, we present a high-density MEA system that allows performing multiple measurement/stimulation functions in parallel (Fig. 1). The implemented switch-matrix approach [18], [22] allows connecting any electrode to any of the measurement/stimulation channels. Moreover,...