High‐Throughput Near‐Field Optical Nanoprocessing of Solution‐Deposited Nanoparticles

Pan, Heng; Hwang, David J.; Ko, Seung Hwan; Clem, Tabitha A.; Fréchet, Jean M. J.; Bäuerle, D.; Grigoropoulos, Costas P.

doi:10.1002/smll.201000345

Cited by 67 publications

(49 citation statements)

References 38 publications

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“…This opens up an opportunity for truly cost-effective laser processing of thiol-based SAMs. In addition, parallel processing, e.g., by using micromirror displays [34], appears feasible.…”

Section: Resultsmentioning

confidence: 99%

Substrate-mediated effects in photothermal patterning of alkanethiol self-assembled monolayers with microfocused continuous-wave lasers

Schröter¹,

Kalus²,

Hartmann³

2012

Beilstein J. Nanotechnol.

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SummaryIn recent years, self-assembled monolayers (SAMs) have been demonstrated to provide promising new approaches to nonlinear laser processing. Most notably, because of their ultrathin nature, indirect excitation mechanisms can be exploited in order to fabricate subwavelength structures. In photothermal processing, for example, microfocused lasers are used to locally heat the substrate surface and initiate desorption or decomposition of the coating. Because of the strongly temperature-dependent desorption kinetics, the overall process is highly nonlinear in the applied laser power. For this reason, subwavelength patterning is feasible employing ordinary continuous-wave lasers. The lateral resolution, generally, depends on both the type of the organic monolayer and the nature of the substrate. In previous studies we reported on photothermal patterning of distinct types of SAMs on Si supports. In this contribution, a systematic study on the impact of the substrate is presented. Alkanethiol SAMs on Au-coated glass and silicon substrates were patterned by using a microfocused laser beam at a wavelength of 532 nm. Temperature calculations and thermokinetic simulations were carried out in order to clarify the processes that determine the performance of the patterning technique. Because of the strongly temperature-dependent thermal conductivity of Si, surface-temperature profiles on Au/Si substrates are very narrow ensuring a particularly high lateral resolution. At a 1/e spot diameter of 2 µm, fabrication of subwavelength structures with diameters of 300–400 nm is feasible. Rapid heat dissipation, though, requires high laser powers. In contrast, patterning of SAMs on Au/glass substrates is strongly affected by the largely distinct heat conduction within the Au film and in the glass support. This results in broad surface temperature profiles. Hence, minimum structure sizes are larger when compared with respective values on Au/Si substrates. The required laser powers, though, are more than one order of magnitude lower. Also, the laser power needed for patterning decreases with decreasing Au layer thickness. These results demonstrate the impact of the substrate on the overall patterning process and provide new perspectives in photothermal laser patterning of ultrathin organic coatings.

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“…This opens up an opportunity for truly cost-effective laser processing of thiol-based SAMs. In addition, parallel processing, e.g., by using micromirror displays [34], appears feasible.…”

Section: Resultsmentioning

confidence: 99%

Substrate-mediated effects in photothermal patterning of alkanethiol self-assembled monolayers with microfocused continuous-wave lasers

Schröter¹,

Kalus²,

Hartmann³

2012

Beilstein J. Nanotechnol.

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“…24 Localized heating can produce either trenches or mounds, 24,38,39 and can induce recrystallization of amorphous or polycrystalline materials, a technologically important process in the fabrication of nanoscale transistors. 34,40 At higher laser pulse energies, ablation occurs, and spot sizes as small as 100 nm have been fabricated using 300 nm-diameter apertured tips and 400 nm femtosecond illumination. 41 Nanoscale ablation and melting has also been demonstrated using a microsphere as the near-field probe, creating features on the order of 100 nm using 355 nm radiation.…”

Section: Materials Modification and Fabrication Mechanismsmentioning

confidence: 99%

“…(b) Schematic of using near-field probes to sinter or ablate gold nanoparticles depending on the laser energy. Reproduced from 34 . (c) Schematic of the photochemical processes involved in patterning SAMs and attaching protein molecules.…”

Section: Figurementioning

confidence: 99%

Nanofabrication Using Near-Field Optical Probes

McLeod

Özcan

2012

SLAS Technology

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Nanofabrication using near-field optical probes is an established technique for rapid prototyping and automated maskless fabrication of nanostructured devices. In this review, we present the primary types of near-field probes and their physical processing mechanisms. Highlights of recent developments include improved resolution by optimizing the probe shape, incorporation of surface plasmonics in probe design, broader use in biological and magnetic storage applications, and increased throughput using probe arrays as well as high speed writing and patterning.

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“…[1][2][3][4] During last few decades, various direct printing technologies including roll-toroll (R2R), gravure printing, screen printing, dip-pen, inkjet printing and three dimensional printing have been developed for electronics patterning of sensor, light emitting diode (LED), radio frequency (RF) tags, flexible display and other micro/nano-sized components. [5][6][7][8][9][10][11] Recently, nanomaterials have been used in various applications due to its particular electrical, chemical, optical and physical properties. [12][13][14][15] Therefore, a lot of efforts have been devoted for implementation of the nanomaterials into industrial manufacturing processes.…”

mentioning

confidence: 99%

Direct Micro Metal Patterning on Plastic Substrates by Electrohydrodynamic Jet Printing for Flexible Electronic Applications

Kwon

Hong

Suh

et al. 2015

ECS J. Solid State Sci. Technol.

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Direct printing is an attractive technology for the patterning of nanomaterials that enables low-cost fabrication of micro/nano-sized electrical devices through minimal use of materials with non-vacuum environment. Although direct printing opens new border for the patterning technology, its resolution has been highly restricted mainly due to its solution-based properties. When the solution contains much liquid, it spreads out on the substrate after printing. While less liquid solution causes clogging at the orifice. In this study, electrohydrodynamic (EHD) jet printer is employed to use both low and high content of nanomaterial solutions: low viscosity nanoink and high viscosity nanopaste. Meanwhile, there are several considerable factors including ink property for operating EHD jet printer such as substrates, voltage condition and working speed. Therefore, parametric studies are conducted to gain fine patterning. As a results, EHD jet printed silver conductive line at high resolution is achieved on various plastic substrates for flexible device applications. As an alternative to the conventional photolithography in the microelectronic manufacturing process, direct printing has been widely interested. The merit of the direct printing technology is known as on-demand digital material deposition & patterning, which leads to process cost reduction, use of no vacuum and mask, compatibility with various substrates and minimization of material wastes.1-4 During last few decades, various direct printing technologies including roll-toroll (R2R), gravure printing, screen printing, dip-pen, inkjet printing and three dimensional printing have been developed for electronics patterning of sensor, light emitting diode (LED), radio frequency (RF) tags, flexible display and other micro/nano-sized components.5-11 Recently, nanomaterials have been used in various applications due to its particular electrical, chemical, optical and physical properties. [12][13][14][15] Therefore, a lot of efforts have been devoted for implementation of the nanomaterials into industrial manufacturing processes. Especially in direct printing, metal nanoparticles such as gold, silver and copper are often required to be synthesized in a form of nanoink, paste or suspension since the nano-sized metal materials provide a significant benefit: low annealing temperature owing to its high surface to volume ratio. [16][17][18][19] Nevertheless, direct printing techniques with nanomaterial solutions have several inherent drawbacks such as coffee stain effect, unclear edge sharpness and limitation on the minimum line width (typically >50 μm) because the process and features are strongly dependent on solution property. [20][21][22] For example, inkjet printing usually uses only low viscosity solution to successfully generate droplet and prevent the nozzle clogging. When volume of the droplet gets smaller, droplet flows up to the surface of the capillary nozzle due to surface tension of the solution and its capillary force. Subsequently, undesirable printing suc...

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High‐Throughput Near‐Field Optical Nanoprocessing of Solution‐Deposited Nanoparticles

Cited by 67 publications

References 38 publications

Substrate-mediated effects in photothermal patterning of alkanethiol self-assembled monolayers with microfocused continuous-wave lasers

Substrate-mediated effects in photothermal patterning of alkanethiol self-assembled monolayers with microfocused continuous-wave lasers

Nanofabrication Using Near-Field Optical Probes

Direct Micro Metal Patterning on Plastic Substrates by Electrohydrodynamic Jet Printing for Flexible Electronic Applications

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