Highly Efficient Grating Coupler for Silicon Nitride Photonics with Large Fabrication Tolerance

Kohli, Manuel; Messner, Andreas; Buriakova, Tatiana; Habegger, Patrick; Chelladurai, Daniel; Blatter, Tobias; Smajić, Jasmin; Zervas, Michael; Fedoryshyn, Yuriy; Koch, Ueli; Leuthold, Juerg

doi:10.1364/iprsn.2021.im4a.6

Cited by 8 publications

(6 citation statements)

References 14 publications

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“…To operate the device, light is coupled from the fiber to the SiN waveguide with efficient and fabrication-tolerant amorphous silicon (aSi) overlay grating couplers for TE polarized light [43]. The SiN is employed for passive routing and splitting with negligible losses.…”

Section: A Plasmonic Ferroelectric Modulator On Sin Platformmentioning

confidence: 99%

Plasmonic Ferroelectric Modulator Monolithically Integrated on SiN for 216 GBd Data Transmission

Kohli¹,

Chelladurai²,

Messner³

et al. 2023

J. Lightwave Technol.

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A high-speed plasmonic barium titanate (BTO, BaTiO3) Mach-Zehnder modulator is presented. We combine nanoscale plasmonics with BTO as solid-state active material and silicon nitride (SiN) for versatile and low loss waveguiding, and integrate them in a monolithic platform. We demonstrate a plasmonic BTO modulator processed onto foundry-produced SiN. The 15 µm long high-speed modulator features a flat electro-optic frequency response up to 70 GHz and is expected to be flat way beyond. A low VπL product of 144 Vµm is shown. Data experiments reaching 216 Gbit/s with a 216 GBd 2PAM signal and 256 Gbit/s with a 128 GBd 4PAM signal are demonstrated. The merger of the versatile silicon nitride platform with high-speed plasmonics using the highly nonlinear ferroelectric BTO is an attractive solution as a future Tb/s optical interconnect platform.

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Section: A Plasmonic Ferroelectric Modulator On Sin Platformmentioning

confidence: 99%

Plasmonic Ferroelectric Modulator Monolithically Integrated on SiN for 216 GBd Data Transmission

Kohli¹,

Chelladurai²,

Messner³

et al. 2023

J. Lightwave Technol.

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“…Many solutions are now available to improve the coupling efficiency of Si3N4 grating couplers. This includes mirror-based structures [18], multilayer arrangements [19], high-index overlays [20,21], or dual-etch grating configurations [22][23][24][25]. However, these approaches require complex fabrication processes, which are, for the most part out of the service offerings of available open-access photonic foundries.…”

Section: Introductionmentioning

confidence: 99%

High-efficiency off-chip grating couplers for silicon nitride photonics

Korcek,

Fraser,

Wilmart

et al. 2024

Integrated Optics: Devices, Materials, and Technologies XXVIII

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Silicon nitride (Si3N4) is a leading platform in integrated photonics, providing unique passive functionalities, while maintaining compatibility with complementary metal-oxide-semiconductor processes and scalable and low-cost highvolume production. However, the moderate index contrast of the Si3N4 platform makes it difficult to implement efficient vertical surface grating couplers. In this work, we present efficient and robust fiber-chip grating couplers on native and hybrid Si3N4 platforms. Minimum coupling losses between -5 dB and -3 dB were measured for single-etch fabricated devices near 1.55 μm wavelength. Moreover, by leveraging the amorphous-silicon overlay on top of the Si3N4 platform, we develop hybrid single-etch grating couplers, with a coupling loss approaching 1 dB. The demonstrated grating couplers are promising for SiN integrated photonics, enabling a rapid and cost-effective chip interfacing with standard optical fibers. This opens up novel opportunities for rising applications, including optical communications, nonlinear optics, or quantum information sciences.

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“…In this work, we introduce a simple and fabrication tolerant method to couple light efficiently into foundry-produced SiN waveguides with silicon overlay gratings; see The work in this paper is in part based on our results first published at the Optica APC congress in 2021 and 2022. 27,28 ■ CONCEPT…”

Section: ■ Introductionmentioning

confidence: 99%

“…The work in this paper is in part based on our results first published at the Optica APC congress in 2021 and 2022. , …”

Section: Introductionmentioning

confidence: 99%

C- and O-Band Dual-Polarization Fiber-to-Chip Grating Couplers for Silicon Nitride Photonics

Kohli,

Chelladurai,

Vukovic

et al. 2023

ACS Photonics

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Highly efficient coupling of light from an optical fiber to silicon nitride (SiN) photonic integrated circuits (PICs) is experimentally demonstrated with simple and fabrication-tolerant grating couplers (GC). Fully etched amorphous silicon gratings are formed on top of foundry-produced SiN PICs in a back-end-of-theline (BEOL) process, which is compatible with 248 nm deep UV lithography. Metallic back reflectors are introduced to enhance the coupling efficiency (CE) from −1.11 to −0.44 dB in simulation and from −2.2 to −1.4 dB in experiments for the TE polarization in the C-band. Furthermore, these gratings can be optimized to couple both TE and TM polarizations with a CE below −3 dB and polarization-dependent losses under 1 dB over a wavelength range of 40 nm in the O-band. This elegant approach offers a simple solution for the realization of compact and, at the same time, highly efficient coupling schemes in SiN PICs.

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Highly Efficient Grating Coupler for Silicon Nitride Photonics with Large Fabrication Tolerance

Abstract: We demonstrate low-loss fiber-to-chip coupling via a-Si grating couplers on top of SiN waveguides for C-band TE light. The suggested simple scheme is fabrication tolerant and offers a path towards coupling efficiencies above -1 dB.

Cited by 8 publications

References 14 publications

Plasmonic Ferroelectric Modulator Monolithically Integrated on SiN for 216 GBd Data Transmission

Plasmonic Ferroelectric Modulator Monolithically Integrated on SiN for 216 GBd Data Transmission

High-efficiency off-chip grating couplers for silicon nitride photonics

C- and O-Band Dual-Polarization Fiber-to-Chip Grating Couplers for Silicon Nitride Photonics

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