Highly-efficient laser ablation of copper by bursts of ultrashort tuneable (fs-ps) pulses

Žemaitis, Andrius; Gečys, Paulius; Barkauskas, Martynas; Račiukaitis, Gediminas; Gedvilas, Mindaugas

doi:10.1038/s41598-019-48779-w

Cited by 77 publications

(46 citation statements)

References 27 publications

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“…In the forthcoming discussion, the V-groove formation dynamics are regarded as similar for all of the different burst modes, and only the increase in surface area is considered to be the main limiting factor that contributes to ablation efficiency decrease. More information regarding the intricacies of V-shape formation may be found in [34].…”

Section: Resultsmentioning

confidence: 99%

Micromachining of Invar Foils with GHz, MHz and kHz Femtosecond Burst Modes

et al. 2020

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In this work, a burst mode laser is used for micromachining of 20 µm–250 µm thick Invar (Fe64/Ni36) foils. Holes were drilled by firing multiple pulses transversely onto the sample without moving the beam (percussion drilling). The utilized laser system generates a burst of a controllable number of pulses (at 1030 nm) with tunable pulse-to-pulse time spacing ranging from 200 ps to 16 ns. The sub-pulses within the burst have equal amplitudes and a constant duration of 300 fs that do not change regardless of the spacing in time between them. In such a way, the laser generates GHz to MHz repetition rate pulse bursts with a burst repetition rate ranging from 100 kHz to a single shot. Drilling of the material is compared with the non-burst mode of kHz repetition rate. In addition, we analyze the drilling speed and the resulting dependence of the quality of the holes on the number of pulses per burst as well as the average laser power to find the optimal micromachining parameters for percussion drilling. We demonstrate that the micromachining throughput can be of an order of magnitude higher when using the burst mode as compared to the best results of the conventional kHz case; however, excess thermal damage was also evident in some cases.

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Section: Resultsmentioning

confidence: 99%

Micromachining of Invar Foils with GHz, MHz and kHz Femtosecond Burst Modes

et al. 2020

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“…The angle of the hollow waveguide array is stepwise changed from 0 • to 360 • in steps of 5 • . For every step, the degree of polarization is calculated by DoP = P max − P min P max + P min (4) and the results for both the quarter-and the half-wave plate are shown in Figure 8.…”

Section: Optical Experimentsmentioning

confidence: 99%

“…Laser material processing technologies comprise innumerable subtractive and additive manufacturing approaches. Typical subtractive, material-removing, processes are, e.g., laser modification and removal [ 1 , 2 ], laser ablation [ 3 , 4 ], laser micro-drilling [ 5 , 6 ], laser cutting [ 7 , 8 ], and laser structuring [ 9 , 10 ]. Laser-based additive manufacturing encompasses, most commonly, stereolithography [ 11 , 12 ], selective laser melting [ 13 , 14 , 15 ], laser sintering [ 16 , 17 ], or laser metal deposition [ 18 , 19 ].…”

Section: Introductionmentioning

confidence: 99%

Challenges in a Hybrid Fabrication Process to Generate Metallic Polarization Elements with Sub-Wavelength Dimensions

2020

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We report on the challenges in a hybrid sub-micrometer fabrication process while using three dimensional femtosecond direct laser writing and electroplating. With this hybrid subtractive and additive fabrication process, it is possible to generate metallic polarization elements with sub-wavelength dimensions of less than 400 nm in the cladding area. We show approaches for improving the adhesion of freestanding photoresist pillars as well as of the metallic cladding area, and we also demonstrate the avoidance of an inhibition layer and sticking of the freestanding pillars. Three-dimensional direct laser writing in a positive tone photoresist is used as a subtractive process to fabricate free-standing non-metallic photoresist pillars with an area of about 850 nm × 1400 nm, a height of 3000 nm, and a distance between the pillars of less than 400 nm. In a subsequent additive fabrication process, these channels are filled with gold by electrochemical deposition up to a final height of 2200 nm. Finally, the polarization elements are characterized by measuring the degree of polarization in order to show their behavior as quarter- and half-wave plates.

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“…High peak power and high pulse energy burst-mode pulse lasers distinctively contain a bunch of high repetition rate pulses with durations ranging from the ultrafast regime (<10 ps) to several nanoseconds and possess a great number of applications [1][2][3][4][5][6][7][8][9]. For example, ultrafast burst-mode lasers have been demonstrated more efficient and accurate in cooled ablation material processing [1][2][3]. In scientific research, each intra-burst pulses could obtain larger energy extraction than uniform high repetition pulses which could be employed as the pump sources of synchronously pumped optical parametric oscillator (SPOPO) and promote the generated MIR laser pulse energies.…”

Section: Introductionmentioning

confidence: 99%