Highly sensitive room-temperature surface acoustic wave (SAW) ammonia sensors based on Co3O4/SiO2 composite films

Tang, Yongliang; Li, Zhijie; Ma, Jianguo; Su, Haiqiao; Guo, Yuanjun; Wang, Lu; Du, Bo; Chen, Jiajun; Zhou, Weilie; Yu, Qingkai; Zu, Xiaotao

doi:10.1016/j.jhazmat.2014.08.001

Cited by 63 publications

(32 citation statements)

References 37 publications

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“…Finally, Tang et al developed SAW sensors based on Co 3 O 4 /SiO 2 and ZnO/SiO 2 composite nanofilms on ST-cut quartz substrates for the detection of NH 3 gas. 68,69,70 Both individual and composite films were tested, and generally higher sensitivities were obtained with the composite films, with a demonstrated detection limit of 30 ppm at a 2 kHz frequency shift and 1 ppm at a 3.5 kHz frequency shift for the ZnO/SiO 2 and Co 3 O 4 /SiO 2 composite nanofilm structures, respectively.…”

Section: Saw-based Sensorsmentioning

confidence: 99%

Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

et al. 2017

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Surface acoustic waves (SAWs), are electro-mechanical waves that form on the surface of piezoelectric crystals. Because they are easy to construct and operate, SAW devices have proven to be versatile and powerful platforms for either direct chemical sensing or for upstream microfluidic processing and sample preparation. This review summarizes recent advances in the development of SAW devices for chemical sensing and analysis. The use of SAW techniques for chemical detection in both gaseous and liquid media is discussed, as well as recent fabrication advances that are pointing the way for the next generation of SAW sensors. Similarly, applications and progress in using SAW devices as microfluidic platforms are covered, ranging from atomization and mixing to new approaches to lysing and cell adhesion studies. Finally, potential new directions and perspectives on the field as it moves forward are offered, with a specific focus on potential strategies for making SAW technologies for bioanalytical applications.

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Section: Saw-based Sensorsmentioning

confidence: 99%

Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

et al. 2017

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“…Therefore, determining the leakage of ammonia in ambient environment becomes critical. To achieve this goal, various types of ammonia sensors, such as metal oxide semiconductor sensors, electrochemical sensors and surface acoustic wave (SAW) sensors were developed, [13][14][15][16][17]. Benefiting from the significant development of RF and crystal technologies, surface acoustic wave techniques (SAWTs) are playing important roles in our daily life [18][19][20][21].…”

Section: Introductionmentioning

confidence: 99%

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

Tang

et al. 2018

Sensors and Actuators B: Chemical

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Northumbria University has developed Northumbria Research Link (NRL) to enable users to access the University's research output. Copyright © and moral rights for items on NRL are retained by the individual author(s) and/or other copyright owners. Single copies of full items can be reproduced, displayed or performed, and given to third parties in any format or medium for personal research or study, educational, or not-for-profit purposes without prior permission or charge, provided the authors, title and full bibliographic details are given, as well as a hyperlink and/or URL to the original metadata page. The content must not be changed in any way. Full items must not be sold commercially in any format or medium without formal permission of the copyright holder. The full policy is available online: http://nrl.northumbria.ac.uk/policies.html This document may differ from the final, published version of the research and has been made available online in accordance with publisher policies. To read and/or cite from the published version of the research, please visit the publisher's website (a subscription may be required.) This is a PDF file of an unedited manuscript that has been accepted for publication. As a service to our customers we are providing this early version of the manuscript. The manuscript will undergo copyediting, typesetting, and review of the resulting proof before it is published in its final form. Please note that during the production process errors may be discovered which could affect the content, and all legal disclaimers that apply to the journal pertain. and SiO2-TiO2 films showed positive frequency shifts, whereas SiO2 film exhibits a negative frequency shift to NH3 gas. it is believed that the negative frequency shift was mainly caused by the increase of NH3 mass loading on the sensitive film while the positive frequency shift was associated to the condensation of the hydroxyl groups (-OH) on the film making the film stiffer and lighter, when exposed to NH3 gas. It demonstrated that humidity played a significant factor on the sensing performance. Comparative studies exhibited that the sensor based on the composite SiO2-TiO2 film had a much better sensitivity to NH3 at a low concentration level (1 ppm) with a response of 2 KHz, and also showed fast response and recovery, excellent selectivity, stability and reproducibility. Accepted Manuscript

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“…Wang et al developed a SAW ammonia sensor with ZnO/SiO 2 composite film, and its response was much higher than SAW sensor with a pristine ZnO film [19]. Tang et al fabricated high-performance SAW NH 3 sensors using the composite films of TiO 2 /SiO 2 , Co 3 O 4 /SiO 2 and Fe 2 O 3 /SiO 2 as the sensing layers, and reported that the addition of SiO 2 could enhance the sensitivity of a SAW sensor because of its porous structures [20][21][22]. All these reported materials have porous structures and active sites for the adsorption of NH 3 .…”

Section: Introductionmentioning

confidence: 99%

NH3-Sensing Mechanism Using Surface Acoustic Wave Sensor with AlO(OH) Film

et al. 2019

Nanomaterials

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In this study, AlO(OH) (boehmite) film was deposited onto a surface acoustic wave (SAW) resonator using a combined sol-gel and spin-coating technology, and prepared and used as a sensitive layer for a high-performance ammonia sensor. The prepared AlO(OH) film has a mesoporous structure and a good affinity to NH3 (ammonia gas) molecules, and thus can selectively adsorb and react with NH3. When exposed to ammonia gases, the SAW sensor shows an initial positive response of the frequency shift, and then a slight decrease of the frequency responses. The sensing mechanism of the NH3 sensor is based on the competition between mass-loading and elastic-loading effects. The sensor operated at room temperature shows a positive response of 1540 Hz to 10 ppm NH3, with excellent sensitivity, selectivity and stability.

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Highly sensitive room-temperature surface acoustic wave (SAW) ammonia sensors based on Co3O4/SiO2 composite films

Cited by 63 publications

References 37 publications

Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

Surface acoustic wave devices for chemical sensing and microfluidics: a review and perspective

NH3 sensing property and mechanisms of quartz surface acoustic wave sensors deposited with SiO2, TiO2, and SiO2-TiO2 composite films

NH3-Sensing Mechanism Using Surface Acoustic Wave Sensor with AlO(OH) Film

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