Holographic femtosecond laser processing with multiplexed phase Fresnel lenses

Abstract

Holographic femtosecond laser processing with multiplexed phase Fresnel lenses for high-speed parallel fabrication of microstructures is proposed. Use of a spatial light modulator (SLM) allows independent tunability of the diffraction peaks, three-dimensional parallelism, and arbitrary, variable features. The diffraction peaks are made uniform by changing the center phase and size of each phase Fresnel lens while taking account of the intensity distribution of the irradiated laser pulse and the spatial frequency response of the SLM.

A tutorial on optics for ultrafast laser materials processing: basic microprocessing system to beam shaping and advanced focusing methods

“…To fabricate the non-periodic microstructures by parallel femtosecond laser processing, the system in Figure 4B can be modified by replacing the DOE with a hologram [e.g., either etched in a transparent glass substrate or formed on a reflective spatial light modulator (SLM)], as illustrated in Figure 4C [30,31] . However, this technique often suffers from a poor axial resolution due to the small convergence angle of the refocused diffraction [31] .…”

Diffractive control of 3D multifilamentation in fused silica with micrometric resolution

“…Here, it is apparent that setting specific parameters to ultrashort pulses can be hard to achieve due to several unwanted effects such as temporal dispersion or spatial phase aberrations. In the temporal and/or spatial domains, pulse parameters can be changed in realtime by using optical devices like liquid crystal SLMs [7][8][9], acoustic-optics crystals [10,11] deformable mirrors [12] or digital micromirror devices (DMDs) [13,14].…”

Parallel femtosecond laser processing with vector-wave control

“…Femtosecond laser processing with a CGH, called holographic femtosecond laser processing [1][2][3], has the advantages of high-throughput pulsed irradiation and high energy-use efficiency. In the holographic femtosecond laser processing previously reported, a simple linear or circular polarization was used.…”