An interpretation model for low reflectivity in ultrahigh spatial-frequency holographic relief gratings is proposed. The model is based on the concept that the grating effective index, caused by grating ultrahigh spatial frequency, is graded in the depth direction and forms an antireflective constitution similar to the multilayer coating. Numerical results show that a sinusoidal grating is antireflective over wide groove depth, wavelength and incident angle ranges, and a grating with nearly triangular section, having a circle arc index distribution, has a very low reflectivity, >10(-4)%. Reflectivity vs groove depth, obtained experimentally for a holographically recorded photoresist grating, agrees fairly well with the numerical results.

We propose a holographic femtosecond laser processing system capable of parallel, arbitrary, and variable patterning. These features are achieved by introducing a spatial light modulator displaying a hologram into the femtosecond laser processing system. We demonstrate the variable parallel processing of a glass sample.

Holographic femtosecond laser processing with multiplexed phase Fresnel lenses for high-speed parallel fabrication of microstructures is proposed. Use of a spatial light modulator (SLM) allows independent tunability of the diffraction peaks, three-dimensional parallelism, and arbitrary, variable features. The diffraction peaks are made uniform by changing the center phase and size of each phase Fresnel lens while taking account of the intensity distribution of the irradiated laser pulse and the spatial frequency response of the SLM.

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