“…This overlap can generate parasitic currents (“hump”), which, in turn, change the electrical properties [ 14 , 15 , 16 ]. Previous studies have been limited in scope and have investigated individual effects such as the vertical overlap of gate electrodes and S/Ds [ 13 , 17 ] or the parasitic current known as the “hump effect” [ 15 ]. In particular, there have been many reports on the parasitic current that is observed in characteristic anomalies due to defect generation, occurring during reliability tests [ 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 ] or semiconductor fabrication processes [ 26 ].…”