2008
DOI: 10.1063/1.3050323
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“Hump” characteristics and edge effects in polysilicon thin film transistors

Abstract: Transfer characteristics of polycrystalline silicon (polysilicon) thin film transistors (TFTs) often show a “hump” in subthreshold regime. This effect, also observed in silicon-on-insulator (SOI) transistors, can be attributed to the presence of an enhanced electrical field at edges of the channel, which is related to the specific shape of the edge and its surrounding oxide. In this paper we attempt an analysis of the hump effect in polysilicon TFTs combining electrical measurements and two dimensional numeric… Show more

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Cited by 55 publications
(21 citation statements)
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“…Interestingly, as shown in Figure 4(e), the second gm peak appears at the similar VTG (~16 V) in all four samples regardless of VDS, indicating that there is a common reason for the second gm peak with reproducibility. Similar signatures in the transfer characteristics were observed in SOI MOSFETs, 52-56 polysilicon thin film transistors, 57 and gate injection GaN-based transistors. 58 Even in the case of previous studies of SOI MOSFETs, which are more optimized than the MoS2 FETs studied here, the origin of additional transport carriers varied depending on the device structure and materials.…”
Section: Top-gated Mos2 Fets Typesupporting
confidence: 70%
“…Interestingly, as shown in Figure 4(e), the second gm peak appears at the similar VTG (~16 V) in all four samples regardless of VDS, indicating that there is a common reason for the second gm peak with reproducibility. Similar signatures in the transfer characteristics were observed in SOI MOSFETs, 52-56 polysilicon thin film transistors, 57 and gate injection GaN-based transistors. 58 Even in the case of previous studies of SOI MOSFETs, which are more optimized than the MoS2 FETs studied here, the origin of additional transport carriers varied depending on the device structure and materials.…”
Section: Top-gated Mos2 Fets Typesupporting
confidence: 70%
“…Since the band gap of TiO 2 is around 3.2 eV which is similar to that of IGZO and TiO 2 itself shows slight sensitivity to the visible light [8], the defects that remained even after the thermal annealing process increased the photo sensitivity of TiO 2 and IGZO. Also, the existence of a hump in the transfer curve suggests that a parasitic transistor is within the channel layer [9]. This parasitic transistor within the IGZO channel could be deduced to be the TiO 2 nanowire.…”
Section: Methodsmentioning
confidence: 99%
“…This overlap can generate parasitic currents (“hump”), which, in turn, change the electrical properties [ 14 , 15 , 16 ]. Previous studies have been limited in scope and have investigated individual effects such as the vertical overlap of gate electrodes and S/Ds [ 13 , 17 ] or the parasitic current known as the “hump effect” [ 15 ]. In particular, there have been many reports on the parasitic current that is observed in characteristic anomalies due to defect generation, occurring during reliability tests [ 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 ] or semiconductor fabrication processes [ 26 ].…”
Section: Introductionmentioning
confidence: 99%