Hybrid-assembled micro dosing system using silicon-based micropump/ valve and mass flow sensor

Nguyen, Nam‐Trung; Schubert, Steffen; Richter, Stefan; Dötzel, Wolfram

doi:10.1016/s0924-4247(98)00039-9

Cited by 56 publications

(39 citation statements)

References 17 publications

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“…A voltage of 60-150 V is able to modulate the membrane to close the valve and flow rates of 12 mL/min at a differential pressure of 110 kPa. Curvature of the silicon substrate can aid in the force displacement characteristics of the actuator [37]. An oxide-nitride insulation film and the n-type Si fixed electrode are assembled into a three-wafer stack.…”

Section: Electrostatic Actuationmentioning

confidence: 99%

Microvalve for Fuel Cells and Miniature Gas Chromatographic System

2003

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Microvalves are important for fluid control in a variety of applications, ranging from miniaturized chemical analysis systems, to precision manufacturing and miniature fuel cells. MEMS technology provides the opportunity to miniaturize valves that work with smaller sample volume, operate rapidly with low power and can potentially be integrated with other components on a single chip. A review of actuators for microvalves is provided, including electrostatic, magnetic, piezoelectric, thermal, shape memory alloy and hydrogel. The design and simulation of a magnetic latching microvalve is provided as a case study. The fabrication by surface micromachining with low temperature, potentially CMOS compatible processing is given.

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Section: Electrostatic Actuationmentioning

confidence: 99%

Microvalve for Fuel Cells and Miniature Gas Chromatographic System

2003

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“…In microfluidics, fluids flow in microchannels with very little dead volume which eliminates contamination and mixing among the fluids (Erickson and Li 2004;). Microfluidic devices offer shorter reaction times, smaller fluid sample/reagent volumes, and parallel processes which are used in many fields, including industrial gas and liquid control, bio-medical instruments, semiconductor processes, and automotive applications (Nguyen et al 1998;Jang and Wang 2007;Elwenspoek et al 1994). Various components for microfluidics have been fabricated, including channels, passive and active valves, actuators for active valves and pumps, flow sensors, reaction chambers, filters, and mixers (Gravesen et al 1993;Jang and Kan 2007).…”

Section: Introductionmentioning

confidence: 99%

Fabrication of microfluidic devices for packaging CMOS MEMS impedance sensors

Jang

Liu

2009

Microfluid Nanofluid

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This work presents a polydimethylsiloxane (PDMS) microfluidic device for packaging CMOS MEMS impedance sensors. The wrinkle electrodes are fabricated on PDMS substrates to ensure a connection between the pads of the sensor and the impedance instrument. The PDMS device can tolerate an injection speed of 27.12 ml/h supplied by a pump. The corresponding pressure is 643.35 Pa. The bonding strength of the device is 32.44 g/mm 2 . In order to demonstrate the feasibility of the device, the short circuit test and impedance measurements for air, de-ionized water, phosphate buffered saline (PBS) at four concentrations (1, 2 9 10 -4 , 1 9 10 -4 , and 6.7 9 10 -5 M) were performed. The experimental results show that the developed device integrated with a sensor can differentiate various samples.

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“…In many cases, such as the example presented in this paper, a three-dimensional model would be strongly required. However, convergence problems tied to the complexity of the fluid dynamics equations allow practical use of threedimensional simulations only for very regular flow channel geometry (absence of steps and cavities) [3][4][5][6], simplified sensor structure [4,7] and/or reduced simulated volume [8]. On the other hand, two-dimensional simulations present less convergence problems and, in principle, can be used to simulate more realistic and irregular flow channel profiles.…”

Section: Introductionmentioning

confidence: 99%