2019
DOI: 10.1063/1.5057441
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Ex situ metrology and data analysis for optimization of beamline performance of aspherical pre-shaped x-ray mirrors at the advanced light source

Abstract: Super high quality aspherical x-ray mirrors with a residual slope error of ∼100 nrad (root-mean-square) and a height error of ∼1-2 nm (peak-to-valley), and even lower, are now available from a number of the most advanced vendors utilizing deterministic polishing techniques. The mirror specification for the fabrication is based on the simulations of the desired performance of the mirror in the beamline optical system and is normally given with the acceptable level of deviation of the mirror figure and finish fr… Show more

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Cited by 14 publications
(17 citation statements)
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“…Functional analysis shows that NRAD1 is nuclear-localized, and its regulatory genes enrich genomewide chromatin interactions. [25][26][27] LINC00152 has been shown to play a role in the progression of many cancers, Abbreviations: CI, indicates confidence; TBL, total bilirubin; ALB, albumin; ALT, alanine aminotransferase; AFP, alpha-fetoprotein.…”
Section: Discussionmentioning
confidence: 99%
“…Functional analysis shows that NRAD1 is nuclear-localized, and its regulatory genes enrich genomewide chromatin interactions. [25][26][27] LINC00152 has been shown to play a role in the progression of many cancers, Abbreviations: CI, indicates confidence; TBL, total bilirubin; ALB, albumin; ALT, alanine aminotransferase; AFP, alpha-fetoprotein.…”
Section: Discussionmentioning
confidence: 99%
“…The proprietary EEM method can in principle achieve the atomic layer-by-layer material removal, and, working closely with the metrology laboratory at the ALS (XROL) to produce even more challenging mirrors for ALS-U, we believe the proposed Wolter mirrors in Table 2 can be fabricated from the improved polishing technique out of such collaboration. If the mirror figures turn out to be slightly off from the designed profiles, the effect can be partly mitigated by slightly adjusting the mirror positions and changing their incidence angles (Yashchuk et al, 2019).…”
Section: Feasibility Of the Optical Designmentioning
confidence: 99%
“…SM pitch angle and detector translation, to reduce the spectral broadening by incorrect VLS parameters. For imaging subassembly, translating/pitching WM1 and WM2 can be used to compensate the figure error as shown by Yashchuk et al (2019).…”
Section: Feasibility Of the Optical Designmentioning
confidence: 99%
“…The specified residual slope error has to be less than 175 nrad rms. This is after subtraction of the best-fit elliptical shape with the values of the conjugate parameters within the specified tolerances [66].…”
Section: Application Of the Angular Calibrationmentioning
confidence: 99%
“…14b and 15b at the angular period of ~ 35 µrad, is really due to the quasi-periodic error of the mirror surface with the spatial period of about 2.1 mm. Such error is rather characteristic for some deterministic polishing processes [66,69]. In order to ensure that the error is really belong to the surface, we have performed an additional run with the mirror shifted in the tangential direction by ~ 1 mm and tilted by ~ 17 µrad.…”
Section: Application Of the Ac Calibration To A Single Measurement Scmentioning
confidence: 99%