2011
DOI: 10.1109/jstqe.2010.2068280
|View full text |Cite
|
Sign up to set email alerts
|

III–V Nanowires on Si Substrate: Selective-Area Growth and Device Applications

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

4
156
0
1

Year Published

2015
2015
2021
2021

Publication Types

Select...
5
4

Relationship

1
8

Authors

Journals

citations
Cited by 156 publications
(161 citation statements)
references
References 102 publications
4
156
0
1
Order By: Relevance
“…[0001], , [11][12][13][14][15][16][17][18][19][20], and . In contrast to GaN regrowth, poor selectivity was observed during InGaN deposition, as InGaN growth can be seen on the SiN x surface in Figs.…”
Section: Characterization Of Indium Gallium Nitride Layersmentioning
confidence: 99%
See 1 more Smart Citation
“…[0001], , [11][12][13][14][15][16][17][18][19][20], and . In contrast to GaN regrowth, poor selectivity was observed during InGaN deposition, as InGaN growth can be seen on the SiN x surface in Figs.…”
Section: Characterization Of Indium Gallium Nitride Layersmentioning
confidence: 99%
“…These reasons provide a strong motivation for investigating their growth by the commercially preferred metalorganic vapor phase epitaxy (MOVPE) method. Such NRs can be grown using either a bottom-up approach using selective area epitaxy [8][9][10][11][12][13][14] or a top-down approach 15,16 in which NRs with controlled aspect ratio are etched from a planar film before the regrowth of GaN/InGaN shell layers over the NRs. 4,16,17 Irrespective of their method of formation, there is substantial evidence that GaN NRs are strain-free once their height exceeds their diameter.…”
Section: Introductionmentioning
confidence: 99%
“…Different synthetic approaches have been developed to fabricate NWs including the vapor-liquid-solid (VLS) growth [5][6][7] , solution-liquid-solid (SLS) growth 8 and template based methods [9][10][11] . Due to the small radial dimensions of the NWs the design of NW heterostructures is not limited by strain as in conventional planar molecular beam epitaxy (MBE) or metal-organic-vapor-phase-epitaxy (MOVPE) thus enabling the fabrication of a wide variety of radial heterostructures as e.g.…”
Section: Introductionmentioning
confidence: 99%
“…A growth mask of either SiNx or SiOx is commonly used in catalyst-free selective area NW growth [32,33], and in self-catalyzed NW growth [34,35]. A growth mask has been successfully used for metal-catalyzed Si microwires [36,37] and III-V NW growth [38][39][40].…”
Section: Nw Growth With a Sinx Growth Maskmentioning
confidence: 99%