32nd European Solid-State Device Research Conference 2002
DOI: 10.1109/essderc.2002.194883
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Impact of Source/drain Implants on Threshold Voltage Matching in Deep Sub-micron CMOS Technologies

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Cited by 15 publications
(10 citation statements)
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“…The first term is the conventional mismatch due to mismatch in threshold voltage, with the matching coefficient [12]- [14]. This is a technology-related factor that is roughly proportional to the gate-oxide thickness, saturating in UDSM technologies around 2-3 mV m [13]. The second term is the mismatch in gate current as introduced here.…”
Section: Gate-leakage Matching and Its Implicationsmentioning
confidence: 99%
See 1 more Smart Citation
“…The first term is the conventional mismatch due to mismatch in threshold voltage, with the matching coefficient [12]- [14]. This is a technology-related factor that is roughly proportional to the gate-oxide thickness, saturating in UDSM technologies around 2-3 mV m [13]. The second term is the mismatch in gate current as introduced here.…”
Section: Gate-leakage Matching and Its Implicationsmentioning
confidence: 99%
“…Using Appendix B, the tunnel conductance can be readily calculated. The normalized gate conductance is then (13) In strong inversion and weak inversion, respectively, this relation can be approximated by the following ones. Note that the dimensions are correct because of implicit multiplication by appropriate scale factors.…”
Section: Appendix Cmentioning
confidence: 99%
“…However, the typically way to minimization is spending area [9,10] which in turn increases power consumption at a given speed, because larger capacitances have to be charged [11]. Gate-leakage mismatch is an extra mismatch source [3] with an area-dependency different from that of conventional matching [9,10,12]. Mismatch of gate leakage current is proportional to the gate current level with in 65nm CMOS a proportionality constant…”
Section: The Impact Of Gate-leakage On Matchingmentioning
confidence: 99%
“…This VT A is a technology-related factor that is roughly proportional to the gate-oxide thickness, saturating in UDSM technologies around 2-3mV m [12]. The second term is the gate current mismatch.…”
Section: The Impact Of Gate-leakage On Matchingmentioning
confidence: 99%
“…Incorporating the area-dependency of gate-leakage and noting that the V T -spread factor A vt saturates at thin oxides around 2-3mVµm [4] .…”
mentioning
confidence: 99%