Imprint lithography for flexible transparent plastic substrates

Liao, Wen-Chang; Hsu, Steve Lien‐Chung; Chu, Sheng−Yuan; Kau, Po-Ching

doi:10.1016/j.mee.2004.03.084

Cited by 14 publications

(7 citation statements)

References 5 publications

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“…Laser-printing technology offers a higher resolution (<10 μm) than inkjet printing and roll-to-roll printing; however, it cannot be used for cost-effective mass production [ 10 ]. Photolithography is a high-resolution technique that have been compatible with rigid substrates; and using some modifications and/or optimization it has also been successfully applied to print the patterns on flexible and easily-damageable substrates [ 11 , 12 , 13 ]. However, it is a multi-step (time consuming) and inefficient process that requires mask preparation as a prerequisite.…”

Section: Inkjet-printing Technologymentioning

confidence: 99%

“…Inkjet printing, which commenced in the 1970s, is a rapidly emerging technique for direct patterning via material deposition based on a layout designed in software. In the inkjet-printing process, a print head (carrying an ink-filled cartridge) horizontally moves back and forth and tiny droplets of ink are propelled through a micrometer-sized nozzle head [ 11 , 12 , 13 ]. The materials to be deposited are usually in the form of colloidal dispersions or chemical solutions.…”

Section: Inkjet-printing Technologymentioning

confidence: 99%

See 1 more Smart Citation

Review of Recent Inkjet-Printed Capacitive Tactile Sensors

Salim

Lim

2017

Sensors

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Inkjet printing is an advanced printing technology that has been used to develop conducting layers, interconnects and other features on a variety of substrates. It is an additive manufacturing process that offers cost-effective, lightweight designs and simplifies the fabrication process with little effort. There is hardly sufficient research on tactile sensors and inkjet printing. Advancements in materials science and inkjet printing greatly facilitate the realization of sophisticated tactile sensors. Starting from the concept of capacitive sensing, a brief comparison of printing techniques, the essential requirements of inkjet-printing and the attractive features of state-of-the art inkjet-printed tactile sensors developed on diverse substrates (paper, polymer, glass and textile) are presented in this comprehensive review. Recent trends in inkjet-printed wearable/flexible and foldable tactile sensors are evaluated, paving the way for future research.

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Section: Inkjet-printing Technologymentioning

confidence: 99%

Section: Inkjet-printing Technologymentioning

confidence: 99%

Review of Recent Inkjet-Printed Capacitive Tactile Sensors

Salim

Lim

2017

Sensors

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“…[2] More recently, imprint lithography has been positioned as a strong candidate for manufacturing transistors on flexible substrates. [7][8][9][10][11] Due to its high throughput, NIL has been detected as a technology for fabrication of low cost plastic electronics in roll-to-roll fashion. [1,[4][5][6] In NIL the patterns are formed by pressing a template against a layer of thermoplastic or photosensitive material, which plays the role of the photoresist in optical lithography.…”

Section: Introductionmentioning

confidence: 99%

Direct laser write (DLW) as a versatile tool in manufacturing templates for imprint lithography on flexible substrates

Ivan

Vaney

Verhaart³

et al. 2009

Alternative Lithographic Technologies

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A computer-controlled laser beam recorder with a wavelength of 405 nm has been employed for patterning the deposited resist with feature sizes varying from a few hundreds of nanometers to tens of micrometers. Four inch silicon templates for hot embossing source/ drain electrodes and metallic circuit for a disposable biosensor were obtained. SEM and optical microscopy reveal accurate transfer of developed photoresist structures into the underlying silicon wafer after plasma dry etching. Etch depths between 100 -600 nm were obtained on the templates, and were further transferred into the imprinted plastic substrate and the metallic layer.

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“…In order to build devices on polymer substrate, a patterning technology [2,3], which enables to fabricate patterns as small as a few tens of nanometers to a few microns on a large area must be developed.…”

Section: Introductionmentioning

confidence: 99%