2010
DOI: 10.1016/j.snb.2010.01.020
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Improved anti-stiction coating of SU-8 molds

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Cited by 15 publications
(8 citation statements)
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“…A hydrophobic coating of FDTS (perfluorodecyltrichlorosilane; ABCR, GmBH, Germany) is applied to this SU-8/Si master via molecular vapour deposition. This coating is notably essential for the durability of the SU-8 master and to facilitate the release of the PDMS stamps [23] . PDMS stamps are produced using standard soft lithography, as extensively described in the literature [24] .…”
Section: Methodsmentioning
confidence: 99%
“…A hydrophobic coating of FDTS (perfluorodecyltrichlorosilane; ABCR, GmBH, Germany) is applied to this SU-8/Si master via molecular vapour deposition. This coating is notably essential for the durability of the SU-8 master and to facilitate the release of the PDMS stamps [23] . PDMS stamps are produced using standard soft lithography, as extensively described in the literature [24] .…”
Section: Methodsmentioning
confidence: 99%
“…The fabrication process is similar for the two chip types: Gold electrodes were defined on 4-inch Pyrex wafers by photolithography, e-beam vapor deposition and lift-off, using titanium as an adhesive layer. On top of the electrodes the channels were formed in SU-8 2005 (MicroChem, Berlin, Germany) by negative photolithography as described by Demierre et al [ 27 , 28 ]. The channels were sealed using a second Pyrex wafer (lid wafer) with openings for electrode access and fluidic inlet and outlet defined using powder blasting.…”
Section: Methodsmentioning
confidence: 99%
“…One hundred-nanometer gold electrodes, with a 20-nm titanium layer for adhesion, were defined on 4-inch Pyrex wafers by a negative photolithography process (resist AZ5214e). On top of the electrodes, the channels were formed in SU-8 2075 (MicroChem, Germany) by photolithography [ 23 , 24 ]. For the experiments, the chips were reversibly sealed with a polydimethylsiloxane (PDMS) lid (Dow Corning, Germany), which was clamped to the chip by a customized holder.…”
Section: Methodsmentioning
confidence: 99%