2005
DOI: 10.1143/jjap.44.5903
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Improved In0.45Al0.55As/In0.45Ga0.55As/In0.65Ga0.35As Inverse Composite Channel Metamorphic High Electron Mobility Transistor

Abstract: A δ-doped In0.45Al0.55As/InGaAs metamorphic high-electron-mobility transistor (MHEMT) using an In0.45Ga0.55As/In0.65Ga0.35As inverse composite channel has been fabricated successfully and demonstrated. The inverse composite channel significantly reduces Coulomb scattering and consequently improves electron mobility as well as carrier confinement. Experimentally, a high extrinsic transconductance of 321 mS/mm and a drain–source saturation current density of 342 mA/mm are obtained for a 0.65 ×200 µm2 gate at 300… Show more

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Cited by 6 publications
(6 citation statements)
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“…Besides, the HEMTs with the graded channels exhibit improved gatevoltage swing (GVS) and linearity due to the counterbalance between the gate-modulation capability and electron saturation speed. In the HEMTs with inversely graded channels, the higher bandgap discontinuity at the channel/barrier interface provides enhanced carrier confinement and is expected to improve the thermal stability [12]. However, the effective distance from the carriers to the gate electrode is shorter in symmetrically graded channel than in the inversely graded channel, because the position of the In-rich region is closer to the Schottky/channel interface for the former, leading to higher 2DEG concentration and better gate-modulation capability.…”
Section: Introductionmentioning
confidence: 99%
“…Besides, the HEMTs with the graded channels exhibit improved gatevoltage swing (GVS) and linearity due to the counterbalance between the gate-modulation capability and electron saturation speed. In the HEMTs with inversely graded channels, the higher bandgap discontinuity at the channel/barrier interface provides enhanced carrier confinement and is expected to improve the thermal stability [12]. However, the effective distance from the carriers to the gate electrode is shorter in symmetrically graded channel than in the inversely graded channel, because the position of the In-rich region is closer to the Schottky/channel interface for the former, leading to higher 2DEG concentration and better gate-modulation capability.…”
Section: Introductionmentioning
confidence: 99%
“…Due to the high low-field electron mobility, high peak electron velocity, large conduction-band discontinuity ( E C ) between Schottky and channel layers, and high sheetcarrier density, InAlAs/InGaAs high electron mobility transistors (HEMTs) lattice matched to InP substrates have shown better microwave and low-noise characteristics than AlGaAs/InGaAs pseudomorphic high electron mobility transistors (PHEMTs) on GaAs substrates [1][2][3][4]. Since InP substrates generally suffer from mechanical fragility, wafer size and high cost, the GaAs substrate is more suitable for manufacturing large-scale millimetre-wave integrated circuit (MMIC) [5].…”
Section: Introductionmentioning
confidence: 99%
“…Figure 5(a) shows the microwave characteristics. The MDDFET exhibits a cut-off frequency (f T ) of 45 GHz and a maximum oscillation frequency (f max ) of 125 GHz as biased at V DS = 2.5 V and V GS = −1.25 V. The RF performances of the proposed device are better than those of most GaAsbased DCFETs and DDCFETs, and are comparable to those of some reported MHEMTs due to the high mobility of the In-rich channel [2,5,7,13]. As compared to conventional GaAs-based InGaAs/GaAs/InGaAs DCFETs or DDCFETs, the degradation of microwave performances due to the high impurity scattering is compensated by the high-speed In-rich channel in the MDDFET.…”
Section: Resultsmentioning
confidence: 52%