Improved Metallization for SAW Filters on LiNbO&lt;inf&gt;3&lt;/inf&gt;

Johnsen, C.A.; Henderson, Jennifer L.

doi:10.1109/ultsym.1986.198717

Cited by 6 publications

(4 citation statements)

References 5 publications

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“…Another factor that can affect the HARE-LWR's performance is the damping caused by the electrodes. It was reported that the electrode material can affect the insertion loss of conventional SAW filters [32]. One might question that using HAREs can increase the damping caused by the electrodes and thus decrease the quality factor of the HARE-LWR.…”

Section: Discussionmentioning

confidence: 99%

Towards Acoustic Radiation Free Lamb Wave Resonators for High-Resolution Gravimetric Biosensing

et al. 2021

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A novel Lamb wave resonator with fully suppressed acoustic radiation in water is proposed for high-resolution masssensitive detection of biomolecules. The elimination of acoustic radiation is achieved by slowing down the Lamb wave to a velocity lower than the sound speed in water. This enables high-qualityfactor resonance in water and reduces the sensing frequency noise. High aspect ratio electrodes (HAREs) are used to slow down the Lamb wave. The elastic resonance and large surface area of the HAREs can also enhance the mass sensitivity of the device. The improved mass sensitivity together with the low frequency noise substantially improves the overall sensing resolution. Although reducing the plate thickness can also slow down the Lamb wave, it makes the device very fragile and not practical to use. In contrast, slowing down the Lamb wave by increasing electrode height allows the use of thick plates which is robust. In this paper, the behavior and performance of the proposed high aspect ratio electrode Lamb wave resonator (HARE-LWR) are theoretically analyzed using finite element method simulations. Optimum design parameters were found through the simulations. Reported results show that a significant figure of merit improvement was achieved by the proposed HARE-LWR design.

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Section: Discussionmentioning

confidence: 99%

Towards Acoustic Radiation Free Lamb Wave Resonators for High-Resolution Gravimetric Biosensing

et al. 2021

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“…Subsequently, 5 nm thick titanium (Ti) and 50 nm thick aluminium (Al) were deposited by electron beam evaporation. The Ti layer improves the adhesion and temperature stability of the Al metallisation [11]. The bond pad and bus bars were formed by another lift-off step using image reversal resist (Clariant AZ5214E) and evaporating 50 nm thick Ti and 700 nm thick Al.…”

Section: Fabricationmentioning

confidence: 99%

P1I-9 Passive 2.45 GHz TDMA based Multi-Sensor Wireless Temperature Monitoring System: Results and Design Considerations

Kuypers

Tanaka

Esashi

et al. 2006

2006 IEEE Ultrasonics Symposium

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This paper presents a TDMA (time division multiple access) based wireless temperature monitoring system using 2.45 GHz passive surface acoustic wave (SAW) delay line sensors. A three-step resolution refinement scheme using a combined delay and phase evaluation is proposed. Using a transmission power of 2 dBm (1.59 mW) a temperature accuracy of 0.19 K and 0.1 K (6σ), were achieved for an interrogation distance of 1.4 m, and 1.3 m, respectively. The sensor design is discussed using experimental results concerning the relationship between the SNR (signal to noise ratio) of the sensors and the accuracy in time delay or phase measurement. Also, the direct electron beam writing on chemically-reduced (black) LiNbO 3 is described.

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“…System filtering requirements included a 3 dB bandwith of 5 MHz, passband ripple of less than . 3 dB, rejection at the image frequency (289. 3 MHz) in excess of 80 dBc, and rejection elsewhere of greater than 50 dBc.…”

Section: Introductionmentioning

confidence: 99%

“…3 dB, rejection at the image frequency (289. 3 MHz) in excess of 80 dBc, and rejection elsewhere of greater than 50 dBc. Additional requirements included a gain of 16 dB, a noise figure of less than 4 dB and a third order intercept of greater than 0 dBm refered to the input.…”

Section: Introductionmentioning

confidence: 99%

The Development of a Surface Mount Hybrid if Section Using Low Loss SAW Filters

Grubb¹,

Bray²,

Bagwell³

et al. 1986

IEEE 1986 Ultrasonics Symposium

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A thick film hybrid circuit incorporating two low loss group-type unidirectional transducer (GUDT) SAW filters was developed for use in a receiver IF section centered at 310.7 MHz. The two filters were cascaded with a preamp and a buffer amplifier on one hybrid to achieve IF gain and filtering.The low loss GUDT SAW filter was designed using a Hamming apodization.Performance, assembly and reliability were enhanced by taking a surface mount hybrid approach. A leadless chip carrier package for the SAW device was designed and optimized for low loss and high out of band rejection. Surface mount chip inductors were evaluated and optimized for match and insertion loss. A high temperature hermetic seal process was developed for the custom SAW package and extensive environmental tests were performed on both the packaged SAW and the fully assembled hybrid to insure a high degree of reliability.Packaged filter losses were less than 6.5 dB per filter. Rejection at the image frequency for the hybrid IF section exceeded 9 0 dBc. Typical peak-to-peak passband ripple was .2 dB.

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Improved Metallization for SAW Filters on LiNbO<inf>3</inf>

Cited by 6 publications

References 5 publications

Towards Acoustic Radiation Free Lamb Wave Resonators for High-Resolution Gravimetric Biosensing

Towards Acoustic Radiation Free Lamb Wave Resonators for High-Resolution Gravimetric Biosensing

P1I-9 Passive 2.45 GHz TDMA based Multi-Sensor Wireless Temperature Monitoring System: Results and Design Considerations

The Development of a Surface Mount Hybrid if Section Using Low Loss SAW Filters

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