Improving spatial resolution of two-photon microfabrication by using photoinitiator with high initiating efficiency

Xing, Jin Feng; Dong, Xian Zi; Chen, Weiqiang; Duan, Xuan Ming; Takeyasu, Nobuyuki; Tanaka, Takuo; Kawata, Satoshi

doi:10.1063/1.2717532

Cited by 209 publications

(140 citation statements)

References 12 publications

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“…We find that increasing the photoresist sensitivity does not increase the resolution (contradicting Ref. [6]) but only increases the dynamic range. For low repetition rates, the sensitization even decreases the resolution, as it decreases the non-linearity of the process towards N = 2.…”

Section: Resultsmentioning

confidence: 39%

“…From the very beginning [2], DLW has been used to produce sub-wavelength feature sizes. During the last decade, the impact of several experimental parameters has been examined in order to increase the photoresists' resolution [5,6,7,8,9]. While improved feature sizes have been demonstrated using a photoresist with higher sensitivity [6] other results have indicated that completely unsensitized photoresists offer the smallest features [8].…”

Section: Introductionmentioning

confidence: 99%

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Three-dimensional multi-photon direct laser writing with variable repetition rate

Fischer¹,

Mueller²,

Kaschke³

et al. 2013

Opt. Express

155

141

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Abstract:We perform multi-photon direct laser writing as a function of laser repetition rate over many orders of magnitude and otherwise unchanged experimental conditions. These new data serve as basis for investigating the influence of different proposed mechanisms involved in the photopolymerization: two-photon absorption, photoionization, avalanche ionization and heat accumulation. We find different non-linearities for high and low repetition rates consistent with different initiation processes being involved. The scaling of the resulting linewidths, however, is neither expected nor found to depend on repetition rate or non-linearity. References and links1. H. B. Sun, S. Matsuo, and H. Misawa, "Three-dimensional photonic crystal structures achieved with two-photonabsorption photopolymerization of resin," Appl. Phys. Lett. 74, 786-788 (1999). 2. S. Kawata, H. B. Sun, T. Tanaka, and K. Takada, "Finer features for functional microdevices," Nature 412, 697-698 (2001). 3. M. Straub and M. Gu, "Near-infrared photonic crystals with higher-order bandgaps generated by two-photon photopolymerization," Opt. Lett. 27, 1824Lett. 27, -1826Lett. 27, (2002

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Section: Resultsmentioning

confidence: 39%

Section: Introductionmentioning

confidence: 99%

Three-dimensional multi-photon direct laser writing with variable repetition rate

Fischer¹,

Mueller²,

Kaschke³

et al. 2013

Opt. Express

155

141

View full text Add to dashboard Cite

show abstract

“…1,2 Femtosecond lasers are frequently used to create 3D patterns in polymers and glasses. [3][4][5][6][7] However, 3D metal direct-writing remains a challenge. Here, we describe a method to fabricate silver nanostructures embedded inside a polymer matrix using a femtosecond laser centered at 800 nm.…”

Section: Introductionmentioning

confidence: 99%

A Method to Fabricate Disconnected Silver Nanostructures in 3D

Vora

Kang

Mazur

2012

JoVE

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The standard nanofabrication toolkit includes techniques primarily aimed at creating 2D patterns in dielectric media. Creating metal patterns on a submicron scale requires a combination of nanofabrication tools and several material processing steps. For example, steps to create planar metal structures using ultraviolet photolithography and electron-beam lithography can include sample exposure, sample development, metal deposition, and metal liftoff. To create 3D metal structures, the sequence is repeated multiple times. The complexity and difficulty of stacking and aligning multiple layers limits practical implementations of 3D metal structuring using standard nanofabrication tools. Femtosecond-laser direct-writing has emerged as a pre-eminent technique for 3D nanofabrication. 1,2 Femtosecond lasers are frequently used to create 3D patterns in polymers and glasses. [3][4][5][6][7] However, 3D metal direct-writing remains a challenge. Here, we describe a method to fabricate silver nanostructures embedded inside a polymer matrix using a femtosecond laser centered at 800 nm. The method enables the fabrication of patterns not feasible using other techniques, such as 3D arrays of disconnected silver voxels. 8 Disconnected 3D metal patterns are useful for metamaterials where unit cells are not in contact with each other, 9 such as coupled metal dot 10,11 or coupled metal rod 12,13 resonators. Potential applications include negative index metamaterials, invisibility cloaks, and perfect lenses.In femtosecond-laser direct-writing, the laser wavelength is chosen such that photons are not linearly absorbed in the target medium. When the laser pulse duration is compressed to the femtosecond time scale and the radiation is tightly focused inside the target, the extremely high intensity induces nonlinear absorption. Multiple photons are absorbed simultaneously to cause electronic transitions that lead to material modification within the focused region. Using this approach, one can form structures in the bulk of a material rather than on its surface.Most work on 3D direct metal writing has focused on creating self-supported metal structures. 14-16 The method described here yields submicrometer silver structures that do not need to be self-supported because they are embedded inside a matrix. A doped polymer matrix is prepared using a mixture of silver nitrate (AgNO 3 ), polyvinylpyrrolidone (PVP) and water (H 2 O). Samples are then patterned by irradiation with an 11-MHz femtosecond laser producing 50-fs pulses. During irradiation, photoreduction of silver ions is induced through nonlinear absorption, creating an aggregate of silver nanoparticles in the focal region. Using this approach we create silver patterns embedded in a doped PVP matrix. Adding 3D translation of the sample extends the patterning to three dimensions. Video LinkThe video component of this article can be found at

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“…As the majority of the materials are bio-compatible [16,17], this approach was employed for the manufacturing of artificial scaffolds for cell proliferation studies [18,19], medical implants for tissue engineering [20,21] as well as regenerative medicine [22,23]. In all of the mentioned examples the materials were passive polymers sensitized only with a photoinitiator responsible for the efficient photostructuring [24]. In order to increase the functionality of the microstructures and metamorphose them into operating devices additional doping with optically active [25,26], magnetic [27,28], and biological [29,30] ingredients has been applied.…”

Section: Introductionmentioning

confidence: 99%

Microfabrication of 3D metallic interconnects via direct laser writing and chemical metallization

Jonavičius¹,

Rekštytė²,

Malinauskas³

2014

Lith. J. Phys.

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We present a developed method based on direct laser writing (DLW) and chemical metallization (CM) for microfabrication of three-dimensional (3D) metallic structures. Such approach enables manufacturing of free-form electro-conductive interconnects which can be used in integrated electric circuits such as micro-opto-electro-mechanical systems (MOEMS). The proposed technique employing ultrafast high repetition rate lasers enables efficient fabrication of 3D microstructures on dielectric as well as conductive substrates. The produced polymer links out of organic-inorganic composite matrix after CM serve as interconnects of separate metallic contacts; their dimensions are: height 15 μm, width 5 μm, length 35-45 μm, and they could provide 300 nΩm resistivity measured in a macroscopic way. This proves the techniques potential for creating integrated 3D electric circuits at microscale.

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Improving spatial resolution of two-photon microfabrication by using photoinitiator with high initiating efficiency

Cited by 209 publications

References 12 publications

Three-dimensional multi-photon direct laser writing with variable repetition rate

Three-dimensional multi-photon direct laser writing with variable repetition rate

A Method to Fabricate Disconnected Silver Nanostructures in 3D

Microfabrication of 3D metallic interconnects via direct laser writing and chemical metallization

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