Impulse Plasma In Surface Engineering - a review

Zdunek, Krzysztof; Nowakowska-Langier, Katarzyna; Choduń, Rafał; Okrasa, Sebastian; Rabiński, M.; Dora, Jerzy; Domanowski, P.; Halarowicz, J

doi:10.1088/1742-6596/564/1/012007

Cited by 12 publications

(9 citation statements)

References 22 publications

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“…It was expected that the differences in plasma composition and energy delivered to the sample will allow to modify the properties of obtained thin films. It should expand the PMS technique and create a wider range of materials by the means different from impulse plasma deposition (IPD) or high-power impulse magnetron sputtering (HIPIMS) [7].…”

Section: Introductionmentioning

confidence: 99%

Influence of modulation frequency on the synthesis of thin films in pulsed magnetron sputtering processes

Strzelecki

Nowakowska-Langier

Choduń

et al. 2018

Materials Science-Poland

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The research on the influence of modulation frequency on the properties of films synthesized using a unique pulsed power supply combined with a standard unbalanced circular magnetron was conducted in the process of pulsed magnetron sputtering (PMS). It was shown that by using different levels of modulation, the composition of plasma (measured by optical emission spectroscopy, OES) as well as film growth rate and morphology (observed with scanning electron microscope, SEM), can be changed. The impact of modulation is related to the used materials and gases and can vary significantly. It was concluded that modulation frequency can greatly influence the synthesis of materials and can be used as an additional parameter in PMS. Specific relations between modulation frequency and synthesized material require further investigation.

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Section: Introductionmentioning

confidence: 99%

Influence of modulation frequency on the synthesis of thin films in pulsed magnetron sputtering processes

Strzelecki

Nowakowska-Langier

Choduń

et al. 2018

Materials Science-Poland

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“…Vapor phase depositions are successfully used as promising tools for the coverage of nanostructure surfaces with functional coatings and the modification of the corresponding physical and chemical surface properties . In general, chemical vapor deposition (CVD) and physical vapor deposition (PVD) methods allow for the growth of continuous uniform layers of several class of materials, i.e.…”

Section: Coatings Of Zno Nanostructure Surfaces With Continuous Functmentioning

confidence: 99%

Surface Engineering of Nanostructured ZnO Surfaces

Laurenti

Stassi

Canavese

et al. 2016

Adv Materials Inter

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are oriented in one direction and their assembly and stacking produces the wurtzite hexagonal symmetry. The noncentrosymmetric and anisotropic crystalline structure of wurtzite-like ZnO generates very interesting properties such as piezo-and pyro-electricity: the application of an external stimulus, like mechanical stress or temperature, deforms the tetrahedron structure. This deformation results in a separation between the positive and negative centers of charge, inducing the formation of a dipole moment. [7,8] The polar surface and anisotropic structure of ZnO can be usefully exploited to form different kinds of micro and nanostructures from 0D to 3D, [5] including, but not limited to nanowires, [9][10][11][12] nanotubes, [13,14] nanobelts, [15][16][17][18][19] nanorings, [20] flower-like morphologies, [21][22][23][24][25] multipods, [26,27] tetrapods, [28][29][30] sponge-like structures [31][32][33][34] and so on [29,[35][36][37][38][39] (Figure 1). Therefore, several research efforts have been invested in studying various preparation procedures for ZnO micro and nano-materials. Wet chemical approaches, like sol-gel, hydrothermal growths, electrodeposition and template-assisted routes, [40,41] as well as vapor-phase methods, for example chemical vapour deposition (CVD), physical vapour deposition (PVD) including sputtering and evaporation approaches, [42][43][44] and epitaxial growth methods [45] are among the most used ones. The great advantages of the wet chemical approaches are the high synthesis versatility, low temperature employed and low costs. [9] From the other side, dry methods take advantage of the high quality and excellent control over the level of crystallinity of the synthesized ZnO structures, as well as the absence of contamination and high purity of the final material. [46] The combination of different properties with the ease and high versatile synthesis of ZnO material in different micro and nanostructures offers a huge possibility of potential applications.For example, ZnO is already used as an efficient catalyst in the selective oxidation of involving oxygenates (i.e., alcohols, aldehydes, and carboxylic acids) and in methanol synthesis catalysts. It is also largely applied as protective, anti-corrosion layer in galvanized steel products, [49][50][51] as well as in paints and sunscreens as an UV absorber. Its biocompatibility makes this material suitable, in the form of microparticles, for paste formulations in cosmetic applications.The combination of the piezoelectric with the semiconducting properties of ZnO is found to result into new exciting physical properties, [52][53][54] and it has recently opened the research field to energy harvesting application. ZnO nanomaterials can be thus used as nanogenerators, able to convert the mechanical deformation from the surrounding environment into electrical Zinc Oxide (ZnO) nanostructures represent promising substrate materials for numerous applications, ranging from new generation solar cells, to bio-and chemical sensors. This interest is due ...

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“…The Ti (grade 1) target was used and the deposition was conducted in Ar and in a Ar+O 2 (1:4) mixture correspondingly for production of Ti and TiO 2 layers. According to the GIMS technology [2,7,12,17] the working gas was periodically injected with a controlled frequency of an order of 10 Hz to the interelectrode space by a set of pulse bistable valves maintaining the pressure in the range of an order of 10 −3 to 10 −1 Pa. The magnetron was permanently supplied by a DPS supplier working at a power of 24 kW in the unipolar PMS mode at a base frequency of 100 kHz with 2 kHz modulation.…”

Section: Coatings Deposition Technologymentioning

confidence: 99%

“…The idea of the process is as follows [2]: while the electrodes are permanently polarized, the discharge (for example the glow discharge in case of magnetron sputtering) could be cyclically initiated and then vanished accordingly with the pressure pulses with a given frequency. As the pressure fluctuations in the threshold range, * E-mail: zdunek@inmat.pw.edu.pl taking place in the interelectrode space, have in such conditions extremely dynamic oscillatory character, an average value of the pressure at which the glow discharge exists is much lower than at the standard conditions especially during the continuous gas flow described well by the Pashen curve.…”

Section: Introductionmentioning

confidence: 99%

Novel GIMS technique for deposition of colored Ti/TiO₂ coatings on industrial scale

Zdunek

Skowroński

Choduń

et al. 2016

Materials Science-Poland

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The aim of the present paper has been to verify the effectiveness and usefulness of a novel deposition process named GIMS (Gas Injection Magnetron Sputtering) used for the first time for deposition of Ti/TiO 2 coatings on large area glass substrates covered in the condition of industrial scale production. The Ti/TiO 2 coatings were deposited in an industrial system utilizing a set of linear magnetrons with the length of 2400 mm each for covering the 2000 × 3000 mm glasses. Taking into account the specific course of the GIMS (multipoint gas injection along the magnetron length) and the scale of the industrial facility, the optical coating uniformity was the most important goal to check. The experiments on Ti/TiO 2 coatings deposited by the use of GIMS were conducted on substrates in the form of glass plates located at the key points along the magnetrons and intentionally non-heated during any stage of the process. Measurements of the coatings properties showed that the thickness and optical uniformity of the 150 nm thick coatings deposited by GIMS in the industrial facility (the thickness differences on the large plates with 2000 mm width did not exceed 20 nm) is fully acceptable form the point of view of expected applications e.g. for architectural glazing.

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Impulse Plasma In Surface Engineering - a review

Cited by 12 publications

References 22 publications

Influence of modulation frequency on the synthesis of thin films in pulsed magnetron sputtering processes

Influence of modulation frequency on the synthesis of thin films in pulsed magnetron sputtering processes

Surface Engineering of Nanostructured ZnO Surfaces

Novel GIMS technique for deposition of colored Ti/TiO₂ coatings on industrial scale

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