In lens BSE detector with energy filtering

Radlička, Tomáš; Unčovský, Marek; Oral, Martin

doi:10.1016/j.ultramic.2018.03.015

Cited by 7 publications

(9 citation statements)

References 8 publications

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“…Due to the large interaction volume of the BSE with the specimen, the resolution of BSE imaging is relatively low in contrast to SE imaging. To improve the resolution, a new type of in-lens detector with high-pass energy filtering that enables the detection of low-loss backscattered electrons was presented; with this method, the decreasing of the high interaction volume on the image resolution is compressed 29 . For increasing the signal-noise ratio, a new configuration of semiconductor detectors, with eight sensors-semiconductor plates positioned in a certain way, for backscattered electrons was proposed 30 .…”

Section: Resultsmentioning

confidence: 99%

“…To improve the resolution, a new type of in-lens detector with high-pass energy filtering that enables the detection of low-loss backscattered electrons was presented; with this method, the decreasing of the high interaction volume on the image resolution is compressed. 29 For increasing the signalnoise ratio, a new configuration of semiconductor detectors, with eight sensors-semiconductor plates positioned in a certain way, for backscattered electrons was proposed. 30 Furthermore, a multiannular configuration BSE detector was developed to enable the enhancement of both the topography contrast and atomic number contrast.…”

Section: Bse Imaging In Fin Cut Processmentioning

confidence: 99%

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Process window improvement for fin cut layer in self-aligned double-patterning process based on backscattered electron imaging

Zhang

Bian

Liu

et al. 2022

J. Micro/Nanopattern. Mats. Metro.

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Background: The self-aligned double-patterning (SADP) process is being used extensively to overcome the lithographic resolution limit in the manufacture of integrated circuits. One use case is fin definition in a fin field-effect transistor. Fin cut layers are applied to modify the fins to the requirements of the device designs.Aim: The traditional secondary electron (SE) imaging exhibits a disadvantage in the process controlling the fin cut layers, and fin damage defects were observed. This work aims to improve the monitoring and controlling capabilities for the process quality of fin cut layers.Approach: A specially designed fin cut process flow and a backscattered electron (BSE) imaging technique are applied to check the process quality. The patterns formed through the fin cut etch and the fin structures are identified and measured simultaneously in one BSE image.Results: By measuring the edge-to-edge distance, pitch walking (PW) of fins, and overlay (OV), the root cause of the fin damage is revealed. The linear fitting model and third-order fitting model are applied to reduce the edge placement error (EPE). The edge distance protecting the "at risk" fin is enlarged from 5.6 to 11.6 nm. The range of the distance is reduced from 11.6 to 8.1 nm, and the improvement in standard deviation is about 33%. Conclusions:This work shows the capability of the BSE imaging technique in the characterization of fin cut layers and the potential in process window improvement restricted to fin damage defects.

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Section: Resultsmentioning

confidence: 99%

Section: Bse Imaging In Fin Cut Processmentioning

confidence: 99%

Process window improvement for fin cut layer in self-aligned double-patterning process based on backscattered electron imaging

Zhang

Bian

Liu

et al. 2022

J. Micro/Nanopattern. Mats. Metro.

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“…X-ray Computed Tomography (XCT) and Focused Ion Beam Scanning Electron Microscopy (FIB-SEM) have both been used to image battery electrodes at the microscale [8,28,34,19]. The past decade has seen improvements in acquisition time (more sensitive detectors) [18], resolution [31,21], and phase sensitivity (phase contrast XCT [7,12], electron energy-selective detection [29]). However, several key challenges remain when trying to capture all relevant features using either approach [6].…”

Section: Introductionmentioning

confidence: 99%

Kintsugi Imaging of Battery Electrodes: Unambiguously Distinguishing Pores from the Carbon Binder Domain using Pt Deposition

Cooper¹,

Roberts²,

Zhao³

et al. 2021

Preprint

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The mesostructure of porous electrodes used in lithium-ion batteries strongly influences cell performance. Accurate imaging of the distribution of phases in these electrodes would allow this relationship to be better understood through simulation. However, imaging the nanoscale features in these components is challenging. While scanning electron microscopy is able to achieve the required resolution, it has well established difficulties imaging porous media. This because the flat imaging planes prepared using focused ion beam milling will intersect with the pores, which makes the images hard to interpret as the inside walls of the pores are observed. It is common to infiltrate porous media with resin prior to imaging to help resolve this issue, but both the nanoscale porosity and the chemical similarity of the resins to the battery materials undermine the utility of this approach for most electrodes. In this study, a new technique is demonstrated which uses \textit{in situ} infiltration of platinum to fill the pores and thus enhance their contrast during imaging. Reminiscent of the Japanese art of repairing cracked ceramics with precious metals, this technique is referred to as the \textit{kintsugi} method. The images resulting from applying this technique to a conventional porous cathode are presented and then segmented using a multi-channel convolutional method. We show that while some cracks in active material particles were filled with the carbon binder phase, others remained empty, which will have implications for the rate performance of the cell. Energy dispersive X-ray spectroscopy was used to validate the distribution of phases resulting from image analysis, which also suggested a graded distribution of the binder relative to the carbon addative. The equipment required to use the kintsugi method is commonly available in major research facilities and so we hope that this method will be rapidly adopted to improve the imaging of electrode materials and porous media in general.

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“…In this paper, we focus on the microscope Magellan 400 FEG with Elstar column [20]. The Elstar column should be equipped by a new type of in-lens BSE detector with high-pass energy filter for the detection of low-loss backscattered electrons [21]. The Elstar column comes equipped with the through-the-lens detector (TLD), which works in four standard modes (detection of secondary electrons, detection of backscattered electrons, charge neutralization, and deep hole visibility).…”

Section: Introductionmentioning

confidence: 99%

In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM

et al. 2019

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Scanning electron microscopes come equipped with different types of detectors for the collection of signal electrons emitted from samples. In-lens detection systems mostly consist of several auxiliary electrodes that help electrons to travel in a direction towards the detector. This paper aims to show that a through-the-lens detector in a commercial electron microscope Magellan 400 FEG can, under specific conditions, work as an energy band-pass filter of secondary electrons that are excited by the primary beam electrons. The band-pass filter properties verify extensive simulations of secondary and backscattered electrons in a precision 3D model of a microscope. A unique test sample demonstrates the effects of the band-pass filter on final image and contrast with chromium and silver stripes on a silicon substrate, manufactured by a combination of e-beam lithography, wet etching, and lift-off technique. The ray tracing of signal electrons in a detector model predicate that the through-the-lens detector works as a band-pass filter of the secondary electrons with an energy window of about 3 eV. By moving the energy window along the secondary electron energy spectrum curve of the analyzed material, we select the energy of the secondary electrons to be detected. Energy filtration brings a change in contrast in the image as well as displaying details that are not otherwise visible.

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In lens BSE detector with energy filtering

Cited by 7 publications

References 8 publications

Process window improvement for fin cut layer in self-aligned double-patterning process based on backscattered electron imaging

Process window improvement for fin cut layer in self-aligned double-patterning process based on backscattered electron imaging

Kintsugi Imaging of Battery Electrodes: Unambiguously Distinguishing Pores from the Carbon Binder Domain using Pt Deposition

In-Lens Band-Pass Filter for Secondary Electrons in Ultrahigh Resolution SEM

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