“…Firstly, the resistance of piezoresistors and piezoresistive coefficient will vary with the temperature, which will influence the zero-offset and sensitivity of the device [38]. Then, as a stress-based transduction device, the residual stresses from the chip fabrication process [39,40], wafer bonding [41], adhesion and compound molding [42,43] can lead to obvious variations in sensor parameters. Meantime, the difference of coefficient of thermal expansion (CTE) between the materials will induce a significant accompanying stress in the device, and the effect varies under different ambient temperatures for different sensors [44,45,46].…”