2006
DOI: 10.1016/j.solmat.2006.06.038
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In situ monitoring of the growth of Cu(In,Ga)Se2 thin films

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Cited by 14 publications
(5 citation statements)
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“…The deposition rates of the elemental sources are calibrated by a quartz crystal and a beam flux monitor. The substrates are heated by a resistive heating element and the in-situ monitoring signals from a thermocouple and a pyrometer are used as the controlled signals of the growth process along with the end point detection (EPD) [8]. The standard 3-stage growth process [8] is employed in the fabrication of the CIGS films.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The deposition rates of the elemental sources are calibrated by a quartz crystal and a beam flux monitor. The substrates are heated by a resistive heating element and the in-situ monitoring signals from a thermocouple and a pyrometer are used as the controlled signals of the growth process along with the end point detection (EPD) [8]. The standard 3-stage growth process [8] is employed in the fabrication of the CIGS films.…”
Section: Methodsmentioning
confidence: 99%
“…The substrates are heated by a resistive heating element and the in-situ monitoring signals from a thermocouple and a pyrometer are used as the controlled signals of the growth process along with the end point detection (EPD) [8]. The standard 3-stage growth process [8] is employed in the fabrication of the CIGS films. We note that a 200Å thick NaF precursor is deposited prior to the growth of the CIGS in the same deposition chamber with no alkaline barrier between the SLG substrate and the Mo layer.…”
Section: Methodsmentioning
confidence: 99%
“…The element sources of Cu, In, Ga and Se were evaporated form Knudsen cells (K-cells) and the temperatures of these sources were calibrated by quartz crystal monitor (QCM) and beam flux monitor for the corresponding compositions of each element. The in situ monitoring signals were employed for process control and end point detection (EPD) [8].…”
Section: Growth Profile Of Cigs Thin Filmmentioning
confidence: 99%
“…The chalcopyrite semiconductor CuIn 1-x Ga x Se 2 (copper indium gallium selenium, CIGS) as the absorber layer of thin-film solar cell, is fast becoming one of the most prominent thin-film photovoltaic materials due to its characteristic that the direct energy gap of CIGS results in a large optical absorption coefficient (10 5 cm −1 ) [3], which in turn permits the use of thin absorber layers (1-2 µm) of active material [4,5] for photovoltaic device applications. The conversion efficiency of CIGS solar cells up to 19.95% (NREL, 2006), more than polycrystalline silicon conversion efficiency of 14%-16% [6].…”
Section: Introductionmentioning
confidence: 99%