In-situ SEM indentation studies of the deformation mechanisms in TiN, CrN and TiN/CrN

Rzepiejewska-Malyska, Karolina; Parlinska-Wojtan, Magdalena; Wasmer, Kilian; Hejduk, K.; Michler, Johann

doi:10.1016/j.micron.2008.02.013

Cited by 52 publications

(25 citation statements)

References 33 publications

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“…Transition nitride multilayer thin films were deposited with ultrahigh vacuum (UHV) direct current (dc) magnetron sputtering in a Leybold L400Sp system on h100i-oriented silicon substrates at a substrate temperature of $70 C. 50,51 Three different types of multilayer combinations, namely TiN/NbN, NbN/CrN, and TiN/CrN 49 and corresponding single-layer reference coatings of TiN, NbN, and CrN were deposited (see Table I). 45,49 Hardness and Young's modulus values of the coatings were obtained by nanoindentation using a TriboIndenter (Hysitron, Inc., Minneapolis, MN) equipped with a Berkovich-shape diamond tip.…”

Section: Methodsmentioning

confidence: 99%

“…45,49 Hardness and Young's modulus values of the coatings were obtained by nanoindentation using a TriboIndenter (Hysitron, Inc., Minneapolis, MN) equipped with a Berkovich-shape diamond tip. This indenter tip geometry allows for indentation while applying relatively low strain gradients, which decreases the probability of sample cracking.…”

Section: Methodsmentioning

confidence: 99%

“…This combination 49 exhibits a granular microstructure such that the columns can grow through several layers. 30 TiN/NbN has nonflat layers with rough and wavy interfaces, which is probably caused by the competitive growth of strongly misoriented columnar grains.…”

Section: A Microstructure Of the Investigated Thin Filmsmentioning

confidence: 99%

“…49 In this paper, three multilayer coatings, namely TiN/CrN, NbN/CrN, and TiN/NbN, with individual layer thickness of approximately 17 nm, consisting of 20 periods in total, were systematically investigated by both in situ SEM micro-and nanoindentation. For comparison, single-layer reference coatings of TiN, CrN, and NbN were deposited at least as thick as their multilayer counterparts.…”

Section: Introductionmentioning

confidence: 99%

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In situ scanning electron microscopy indentation studies on multilayer nitride films: Methodology and deformation mechanisms

et al. 2009

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Systematic studies of the deformation mechanisms of multilayer transition metal nitride coatings TiN/CrN, TiN/NbN, and NbN/CrN, and corresponding reference coatings of TiN, NbN, and CrN deposited by a direct current (dc) magnetron sputtering process onto silicon h100i have been performed. Mechanical characterization was conducted using a combination of microindentation and nanoindentation in the load range 30 to 150 mN and 0.5 to 3.5 mN, respectively. For both load ranges, scanning electron microscopy (SEM) in situ indentation was used to observe the indentation process including any pileup, sink-in, and fracture mechanisms specific to each coating. The coatings' microstructure, both before and after indentation, was analyzed using transmission electron microscopy (TEM). It was possible to both correlate the indentation load-displacement response to surface roughness effects and fracture modes (substrate and film cracking) and observe deformation mechanisms within the coatings.

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Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: A Microstructure Of the Investigated Thin Filmsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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In situ scanning electron microscopy indentation studies on multilayer nitride films: Methodology and deformation mechanisms

et al. 2009

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“…As well, AFM images are also obtained at the micrometer level, only showing the surface morphologies of indentation impressions. [15][16][17][18][19][20][21][22][23][24][25] Comparing with optical and AFM images, SEM images have a better resolution of indentation impressions. However, little data has focused on the atomic-scale microstructure underneath the indenter, although the cross-section and surface morphologies with columnar or nanocrystalline structures have been broadly reported.…”

Section: Introductionmentioning

confidence: 99%

Atomic-scale microstructure underneath nanoindentation in Al-Cr-N ceramic films

Lin

2015

AIP Advances

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In this work, Al-Cr-N ceramic films deformed by nanoindentation were peeled off from silicon substrates and their atomic-scale microstructures underneath the indenter were investigated by high resolution transmission electron microscope (HR-TEM). Dislocations were formed underneath the indenter and they accumulated along nano-grain boundaries. The accumulative dislocations triggered the crack initiation along grain boundaries, and further resulted in the crack propagation. Dislocations were also observed in nano-grains on the lateral contact area. A model was proposed to describe the variation of microstructures under nanoindentation.

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Crack Resistance of Diamond‐Like Carbon Coatings

Bobzin¹,

Brögelmann²,

Carlet

et al. 2021

Vak Forsch Prax

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Summary The aim of the current paper is the study of the crack resistance of diamond‐like carbon (DCL) coatings deposited by direct current magnetron sputtering (dcMS) and high‐power pulse magnetron sputtering (HPPMS) with different process parameters. For this purpose nanoindentation with a very high force resolution of RFN ≤ 1 nN was used to analyze different a‐C coatings, which were deposited under variation of the process gases argon, helium and neon. Owing to significantly high force resolution of the indenter, a large number N = 31,872 of data points in each force‐displacement curve was recorded, which enabled the desired analyses. Based on the results, it can be stated that the nanoindentation is able to provide knowledge on the crack formation of DLC coatings. The coatings deposited with neon show a more promising behavior in point of elastic‐plastic properties. In addition, the evaluation of the force‐displacement curves indicates a higher resistance to crack formation of these coatings. Furthermore, investigations on the influence of the process gas pressure were conducted using Ne and three pressures p = 2.0 Pa, p = 1.5 Pa and p = 1.0 Pa. The results show that applying the moderate gas pressure can generate coatings with the highest toughness compared to the coatings deposited with higher and lower gas pressures.

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In-situ SEM indentation studies of the deformation mechanisms in TiN, CrN and TiN/CrN

Cited by 52 publications

References 33 publications

In situ scanning electron microscopy indentation studies on multilayer nitride films: Methodology and deformation mechanisms

In situ scanning electron microscopy indentation studies on multilayer nitride films: Methodology and deformation mechanisms

Atomic-scale microstructure underneath nanoindentation in Al-Cr-N ceramic films

Crack Resistance of Diamond‐Like Carbon Coatings

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