“…The luminescence efficiency of an indirect gap matrix can be dramatically improved by inserting a narrow and a direct-gap material like InAs or InGaAs in silicon matrix. So far, only few details on the growth mechanism of InAs on silicon substrates have been provided in literature [2,10]. In this contribution, we concentrate on basic growth studies addressing mainly morphological properties of quantum-dot like structures grown directly on silicon surfaces with a main emphasis on surface preparation and growth parameters.…”