J. Magn. Soc. Jpn.
 2002
DOI: 10.3379/jmsjmag.26.248
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Induced Magnetic Anisotropy and Noise Property for the Soft Underlayer of an FeTaN Thin Film Controlled by an In-line Process.

斉藤 伸1,
平井 健一2,
高橋 研3
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