Inductively coupled plasma heating in a weakly magnetized plasma

Kim, S. S.; Chang, C. S.; Yoon, N. S.; Whang, Ki‐Woong

doi:10.1063/1.873250

Cited by 37 publications

(14 citation statements)

References 29 publications

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“…Another way to estimate the nonlocal to local transition is by using the nonlocal parameter which is investigated by Kim et al 39 In Ref. 39, the nonlocal parameter is presented as…”

Section: Resultsmentioning

confidence: 99%

Transition of electron kinetics in weakly magnetized inductively coupled plasmas

et al. 2013

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Transition of the electron kinetics from nonlocal to local regime was studied in weakly magnetized solenoidal inductively coupled plasma from the measurement of the electron energy probability function (EEPF). Without DC magnetic field, the discharge property was governed by nonlocal electron kinetics at low gas pressure. The electron temperatures were almost same in radial position, and the EEPFs in total electron energy scale were radially coincided. However, when the DC magnetic field was applied, radial non-coincidence of the EEPFs in total electron energy scale was observed. The electrons were cooled at the discharge center where the electron heating is absent, while the electron temperature was rarely changed at the discharge boundary with the magnetic field. These changes show the transition from nonlocal to local electron kinetics and the transition is occurred when the electron gyration diameter was smaller than the skin depth. The nonlocal to local transition point almost coincided with the calculation results by using nonlocal parameter and collision parameter. V C 2013 AIP Publishing LLC. [http://dx.

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“…Another way to estimate the nonlocal to local transition is by using the nonlocal parameter which is investigated by Kim et al 39 In Ref. 39, the nonlocal parameter is presented as…”

Section: Resultsmentioning

confidence: 99%

Transition of electron kinetics in weakly magnetized inductively coupled plasmas

et al. 2013

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“…However, the application of external magnetic field changes the electrodynamics of the plasma. [13][14][15][16][17][18] In the presence of an external static magnetic field perpendicular to the plasma boundary, a plane polarized wave splits into left polarized/ handed ͑+͒ and right polarized/handed waves. As far as driving frequency is concerned magnetized plasma has two regions called skin ͑ Ͼ ͉⍀ e ͉͒ and wave effect dominant ͑ Ͻ ͉⍀ e ͉͒ regions.…”

Section: Introductionmentioning

confidence: 99%

“…In the wave effect dominant region there is a wave penetration into the plasma. [14][15][16][17] Depending on the plasma parameters and operating conditions the plasma can exhibit local or nonlocal behavior. For very low pressure both unmagnetized ICP discharges and magnetized ICP ͑MICP͒ discharges exhibit nonlocal behavior.…”

Section: Introductionmentioning

confidence: 99%

“…However, as ⌳ Ϯ increases to be greater than 1, the system exhibits nonlocal behavior and the electric field decays nonmonotonically. [14][15][16][17][18] Many analytic kinetic models have been published to take nonlocal effect into account. [14][15][16][17] However, no fluid model for MICP discharges exists that takes nonlocal/warm plasma effects into account.…”

Section: Introductionmentioning

confidence: 99%

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Effective viscosity model for electron heating in warm magnetized inductively coupled plasma discharges

Rehman

Lee

2009

Physics of Plasmas

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Articles you may be interested inModeling of inductively coupled plasma SF6/O2/Ar plasma discharge: Effect of O2 on the plasma kinetic properties J. Vac. Sci. Technol. A 32, 021303 (2014); 10.1116/1.4853675 Transition of electron kinetics in weakly magnetized inductively coupled plasmas Phys. Plasmas 20, 101612 (2013); 10.1063/1.4826949 Modeling of inductively coupled plasma Ar/Cl2/N2 plasma discharge: Effect of N2 on the plasma properties J. Vac. Sci. Technol. A 31, 011301 (2013); 10.1116/1.4766681 Nonlocal collisionless power absorption using effective viscosity model in inductively coupled plasma discharges Phys. Plasmas 16, 073505 (2009);An effective viscosity model for warm magnetized inductively coupled plasma ͑MICP͒ discharges has been derived. It calculates the power absorbed inside MICP discharges that takes nonlocal behavior into account with the help of effective viscosity terms in the momentum equations for right-handed and left-handed components of the wave. The validity of this model for warm MICP discharges has been checked by comparing it with self-consistent kinetic model for warm MICP discharges. This effective viscosity model shows nonmonotonic decay for right-and left-handed components of the electric field inside MICP discharges. It also shows regions of negative power absorption which cannot be shown using conventional fluid models. The power absorbed per unit area ͑for right-and left-handed components͒ calculated using effective viscosity model is similar to that calculated using computationally extensive kinetic models over a wide range of MICP discharge conditions.

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“…Inductively coupled plasma (ICP) sources are widely used in semiconductor fabrication processing because they allow high density plasma with good uniformity to be easily obtained under low pressure without the need for an external magnetic field [1][2][3][4][5][6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Calculation of the Reactor Impedance of a Planar-type Inductively Coupled Plasma Source

Kwon¹,

Jung²,

Yoon³

2012

Journal of Electrical Engineering and Technology

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-A two-dimensional nonlocal heating theory of planar-type inductively coupled plasma source has been previously reported with a filamentary antenna current model. However, such model yields an infinite value of electric field at the antenna position, resulting in the infinite self-inductance of the antenna. To overcome this problem, a surface current model of antenna should be adopted in the calculation of the electromagnetic fields. In the present study, the reactor impedance is calculated based on the surface current model and the dependence on various discharge parameters is studied. In addition, a simpler method is suggested and compared with the surface current calculation.

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Inductively coupled plasma heating in a weakly magnetized plasma

Cited by 37 publications

References 29 publications

Transition of electron kinetics in weakly magnetized inductively coupled plasmas

Transition of electron kinetics in weakly magnetized inductively coupled plasmas

Effective viscosity model for electron heating in warm magnetized inductively coupled plasma discharges

Calculation of the Reactor Impedance of a Planar-type Inductively Coupled Plasma Source

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