Influence of beam radii on a common-path compensation method for laser beam drifts in laser collimation systems

Abstract

The laser beam drift is a main factor that influences laser collimation measurement accuracies. In such measurements, the common-path compensation method is an efficient way to eliminate errors which are normally produced by the laser beam drift. Based on our current common-path compensation system, compensations for the laser beam drift were studied by different laser beam radii and detectors. The measurements have shown that the compensation effect for 3 mm beam radius is better than the ones of 1.5 mm and 4.0 mm beam radii. Based on this, the ratio between the 3 mm beam radius and the total area of the quadrant detector, which is 36%, has indicated the best compensation effect.

Simultaneous Measurement of 6DOF Motion Errors of Linear Guides of CNC Machine Tools Using Different Modes

“…System errors usually affect the performance of the measurement system, including the manufacturing and installation errors of optical components, the angle drift of the measurement beam, and the installation errors of the detector in the measurement head. These errors can be compensated by adding a common-path beam drift measurement and compensation structure [ 25 ] and establishing an error compensation model [ 24 , 26 ].…”

“…The positioning error of the linear axis is measured by a dual-frequency laser interferometer; this measurement model is not discussed here. Other five degrees of freedom (5DOF) motion errors are based on the idea of ray tracing [ 24 , 25 ]. A Cartesian coordinate system for the measurement head and target mirror was established.…”

Comprehensive measurement model of geometric errors for three linear axes of computer numerical control machine tools

“…The various types of systematic errors, including the manufacturing and installation errors of the CCR and RAP, error crosstalk, beam drift, nonparallelism errors between the two measured beams, and difference between the two measurement modes are reflected in the models. Among them, the measurement and compensation of beam drift have been deeply studied in the previous work [36]. By employing the proposed system to measure CNC machine tools and using the comprehensive measurement model to process raw data, high-precision geometric error evaluation results can be obtained.…”

Research on laser spot location accuracy of low-power laser diode source applied to high precision laser measurement system

“…Liu et al [7] analyzed the pointing stability of the laser beam, and pointed out that reducing the lens focusing length can improve the location stability of the laser equipment. Zhao et al [8] designed a laser collimation system, and analyzed the influence of different laser spot radii on the measurement accuracy. Liu et al [9] analyzed the influence of the laser spot energy distribution on the location results, and developed a high-speed rotating diffuser to suppress the measurement error which was caused by the change of the energy distribution.…”