Influence of Film Thickness on Structural, Surface Morphology and Electrical Properties of Spray Pyrolise Nanostructured WO<sub>3</sub> Thin Films

Patil, J. M.; Patil, S. B.; Bari, R. H.; Chaudhari, R. T.; Sonar, A. N.

doi:10.1166/jap.2016.1281

Cited by 2 publications

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“…Preparation of nanostructured WO 3 thin films is one of important research interests. There are various methods to fabricate nanostructured WO 3 thin films, including spray pyrolysis, sol‐gel, chemical vapor deposition method, and physical vapor deposition method . However, the nanosize, distribution, and orientation of the tungsten oxide thin films prepared by the above methods are random and irregular, resulting in poor reproducibility of electrochromic properties, which is not suitable for practical application in “smart windows.” Glancing angle magnetron sputtering deposition technology can realize precise control of the morphology, size, and density of nanostructured WO 3 thin films through adjusting and optimizing deposition parameters …”

Section: Introductionmentioning

confidence: 99%

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Electrochromic Properties of Nanostructured WO₃ Thin Films Deposited by Glancing‐Angle Magnetron Sputtering

Wang

Chen

Gao

et al. 2019

Adv Elect Materials

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been significantly optimized via control of their nanostructure. Preparation of nanostructured WO 3 thin films is one of important research interests. There are various methods to fabricate nanostructured WO 3 thin films, including spray pyrolysis, [5] sol-gel, [6] chemical vapor deposition method, [7] and physical vapor deposition method. [8] However, the nanosize, distribution, and orientation of the tungsten oxide thin films prepared by the above methods are random and irregular, resulting in poor reproducibility of electrochromic properties, which is not suitable for practical application in "smart windows." Glancing angle magnetron sputtering deposition technology can realize precise control of the morphology, size, and density of nanostructured WO 3 thin films through adjusting and optimizing deposition parameters. [9,10] In this paper, nanostructured tungsten trioxide thin films were deposited by glancing angle reactive magnetron sputtering. The effects of nanostructures on the electrochromic properties and optical properties of WO 3 thin films were compared with those of dense film deposited by conventional magnetron sputtering.

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Section: Introductionmentioning

confidence: 99%

“…There are various methods to fabricate nanostructured WO 3 thin films, including spray pyrolysis, [5] sol-gel, [6] chemical vapor deposition method, [7] and physical vapor deposition method. Preparation of nanostructured WO 3 thin films is one of important research interests.…”

mentioning

confidence: 99%

Electrochromic Properties of Nanostructured WO₃ Thin Films Deposited by Glancing‐Angle Magnetron Sputtering

Wang

Chen

Gao

et al. 2019

Adv Elect Materials

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Synthesis of γ‐WO₃ thin films by hot wire‐CVD and investigation of its humidity sensing properties

Jadkar

Pawbake

Waykar

et al. 2017

Physica Status Solidi (a)

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In this study, monoclinic tungsten oxide (γ‐WO3) have been grown in a single step using HW‐CVD method by resistively heating W filaments in a constant O2 pressure. The formation of γ‐WO3 was confirmed using low angle‐XRD and Raman spectroscopy analysis. Low angle‐XRD analysis revealed that as‐deposited WO3 film are highly crystalline and the crystallites have preferred orientation along the (002) direction. HRTEM analysis and SAED pattern also show the highly crystalline nature of WO3 with d spacing of ∼ 0.38 nm, having an orientation along the (002) direction. Surface topography investigated by SEM analysis shows the formation of a uniform and homogeneous cauliflower like morphology throughout the substrate surface without flaws and cracks. A humidity sensing device incorporating WO3 is also fabricated, which shows a maximum humidity sensitivity factor of ∼ 3954% along with a response time of ∼14 s and a recovery time of ∼25 s. The obtained results demonstrate that it is possible to synthesize WO3 in a single step by HW‐CVD method and to fabricate a humidity sensor by using it.

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Influence of Film Thickness on Structural, Surface Morphology and Electrical Properties of Spray Pyrolise Nanostructured WO₃ Thin Films

Cited by 2 publications

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Electrochromic Properties of Nanostructured WO₃ Thin Films Deposited by Glancing‐Angle Magnetron Sputtering

Electrochromic Properties of Nanostructured WO₃ Thin Films Deposited by Glancing‐Angle Magnetron Sputtering

Synthesis of γ‐WO₃ thin films by hot wire‐CVD and investigation of its humidity sensing properties

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Influence of Film Thickness on Structural, Surface Morphology and Electrical Properties of Spray Pyrolise Nanostructured WO3 Thin Films

Cited by 2 publications

References 0 publications

Electrochromic Properties of Nanostructured WO3 Thin Films Deposited by Glancing‐Angle Magnetron Sputtering

Electrochromic Properties of Nanostructured WO3 Thin Films Deposited by Glancing‐Angle Magnetron Sputtering

Synthesis of γ‐WO3 thin films by hot wire‐CVD and investigation of its humidity sensing properties

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Influence of Film Thickness on Structural, Surface Morphology and Electrical Properties of Spray Pyrolise Nanostructured WO₃ Thin Films

Electrochromic Properties of Nanostructured WO₃ Thin Films Deposited by Glancing‐Angle Magnetron Sputtering

Electrochromic Properties of Nanostructured WO₃ Thin Films Deposited by Glancing‐Angle Magnetron Sputtering

Synthesis of γ‐WO₃ thin films by hot wire‐CVD and investigation of its humidity sensing properties