“…Comparing results of SEM study and optical metrology, we should conclude that in despite of higher thickness of films on glass substrates, they contain a lower density of agglomerated inclusions. Therefore, the PLD technology allows to obtain very thin films of good quality from the vanadate nanoparticles, especially if compare with such methods as sol-gel deposition, spincoating, reactive sputtering, and liquid phase epitaxy (Chukova et al, 2019b;Zhu et al, 2018;Malashkevich et al, 2016;Nakajima et al, 2008;Zorenko et al, 2005). Investigation of reflection and transmittance (for the samples on glass substrates) spectra was carried out to estimate contributions of the film layers in spectral properties of the obtained samples.…”