2011
DOI: 10.1088/1674-1056/20/5/058501
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Influence of60Co gamma radiation on fluorine plasma treated enhancement-mode high-electron-mobility transistor

Abstract: AlGaN/GaN depletion-mode high-electron-mobility transistor (D-HEMT) and fluorine (F) plasma treated enhancement-mode high-electron-mobility transistor (E-HEMT) are exposed to 60 Co gamma radiation with a dose of 1.6 Mrad (Si). No degradation is observed in the performance of D-HEMT. However, the maximum transconductance of E-HEMT is increased after radiation. The 2DEG density and the mobility are calculated from the results of capacitance-voltage measurement. The electron mobility decreases after fluorine plas… Show more

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Cited by 1 publication
(1 citation statement)
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“…[6−11] However, there has been little research on the radiation reliability [12] of fluorine plasma treatment Emode AlGaN/GaN HEMTs and the methods to improve its radiation hardness. [13] In the present paper, we realize normally-off Al-GaN/GaN HEMT devices by using fluoride-based plasma treatment. An E-mode AlGaN/GaN HEMT is exposed to 60 Co γ-rays at a dose of 3 Mrad (Si).…”
Section: Introductionmentioning
confidence: 99%
“…[6−11] However, there has been little research on the radiation reliability [12] of fluorine plasma treatment Emode AlGaN/GaN HEMTs and the methods to improve its radiation hardness. [13] In the present paper, we realize normally-off Al-GaN/GaN HEMT devices by using fluoride-based plasma treatment. An E-mode AlGaN/GaN HEMT is exposed to 60 Co γ-rays at a dose of 3 Mrad (Si).…”
Section: Introductionmentioning
confidence: 99%