2016
DOI: 10.11113/jt.v78.9754
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Influences of Deposition Time on Tio2 Thin Films Properties Prepared by CVD Technique

Abstract: Titanium dioxide (TiO2) is known as a material with exceptionally good optical, mechanical and thermal properties. An increasing interest has been devoted to the study of TiO2 because of their numerous applications in various industries. In this study, by controlling process parameters, TiO2 thin films were successfully deposited on a glass substrate using chemical vapor deposition (CVD) technique. It has been fabricated using two source materials that are 99.9 % pure titanium and graphite powder at 1000 °C an… Show more

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“…The barrier heterogeneity can be attributed to the strong morphological roughness of the films. For example, it was shown in [32] that TiO 2 , films deposited on a glass substrate for 1 hour, the roughness reaches ∼ 90 nm at a grain size of ∼ 150 nm.…”
Section: Resultsmentioning
confidence: 99%
“…The barrier heterogeneity can be attributed to the strong morphological roughness of the films. For example, it was shown in [32] that TiO 2 , films deposited on a glass substrate for 1 hour, the roughness reaches ∼ 90 nm at a grain size of ∼ 150 nm.…”
Section: Resultsmentioning
confidence: 99%