This paper presents a broadband low-loss fanin wafer level ball grid
array (WLB) vertical through-moldvia (TMV) interconnect that enables
highly integrated systemin-package (SiP) applications beyond 220 GHz.
The dedicate advantage of the proposed approach is to further minimize
the separation between package components (e.g., antenna in package
(AiP)) and on-chip receiver or transmitter chain. To demonstrate the
robustness of the TMV interconnect design, the necessity for
co-simulation of the integrated circuit (IC) package and the IC itself
during the package-design is shown. Therefore, an in-depth analysis of
the suppression of parasitic mode oscillation inside silicon is carried
out. Furthermore, the parasitic radiation loss at the TMV interconnect
discontinuity is given and a verification of the proposed TMV due to
high agreement of simulation and measurement results is demonstrated.
The interconnect has been verified with a measured 10 dB return loss
bandwidth of 38 GHz and a de-embedded insertion loss of less than 2.8 dB
at 275 GHz, which enables a compact low-loss broadband signal transition
from active IC components in the backend-of-line (BEOL) to passive
components in package. Compared to fan-out WLB, the developed fanin WLB
solution enables higher integration density of active and passive
components with the shortest interconnects for minimal insertion loss.
Thus, the proposed fan-in TMV packaging provides a very compact,
easy-to-assemble and cost-efficient alternative for SiP designs for
future broadband communication and sensing solutions.