2013
DOI: 10.1109/jsen.2012.2230113
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InGaN/GaN Multiquantum-Well Metal-Semiconductor-Metal Photodetectors With Beta-${\rm Ga}_{2}{\rm O}_{3}$ Cap Layers

Abstract: InGaN/GaN multiquantum-well (MQW) metalsemiconductor-metal photodetectors with a beta-Ga 2 O 3 cap layer formed by the furnace oxidation of a GaN epitaxial layer are fabricated and characterized. The beta-Ga 2 O 3 cap layer is found to suppress the reverse leakage current by at least about two orders of magnitude with a 5-V applied bias because it creates a thicker and higher potential barrier. The reverse leakage current can be further reduced and a 90-fold larger ultraviolet-to-visible rejection ratio can be… Show more

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Cited by 17 publications
(5 citation statements)
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“…Thus, Ga 2 O 3 has been used as electroluminescent devices, 2) Schottky barrier devices, 3) field-effect transistors, 4) heterojunction UV detectors, 5) high-temperature gas (O 2 , H 2 , CO, CH 4 , etc.) sensors, 6) humidity sensors, 7) solar-blind photodetectors, 8) capping/passivation coatings, 9) transparent conducting oxides, 10) and photocatalysis. 11) Various Ga 2 O 3 polymorphs, including , , and phases, have been synthesized and extensively studied.…”
Section: Introductionmentioning
confidence: 99%
“…Thus, Ga 2 O 3 has been used as electroluminescent devices, 2) Schottky barrier devices, 3) field-effect transistors, 4) heterojunction UV detectors, 5) high-temperature gas (O 2 , H 2 , CO, CH 4 , etc.) sensors, 6) humidity sensors, 7) solar-blind photodetectors, 8) capping/passivation coatings, 9) transparent conducting oxides, 10) and photocatalysis. 11) Various Ga 2 O 3 polymorphs, including , , and phases, have been synthesized and extensively studied.…”
Section: Introductionmentioning
confidence: 99%
“…Using the data shown in Fig. 5 we can determine the NEP of our photodetector by using the equation [28]…”
Section: Resultsmentioning
confidence: 99%
“…III-nitride material has a suitable large bandgap energy, high quantum efficiency and high electron mobility. Many types of AlGaInN-based photodetectors (PDs) have been fabricated and tested [3,4,5,6,7,8,9,10,11,12,13,14,15,16,17,18,19,20,21,22,23,24,25,26,27,28]. Schottky barrier PDs have been commercialized by several companies, and the typical responsivities of this type of PD are 0.18, 0.13, and 0.06 A/W at 350, 300, and 254 nm, respectively [3].…”
Section: Introductionmentioning
confidence: 99%