InGaN-based light-emitting diodes (LEDs) with inverted pyramidal structures at their GaN/patterned-sapphire interfaces were fabricated by laser decomposition and wet crystallographic etching. Partially roughening the LED structure increased the light output power of the by 21% enhancement at an operating current of 20mA over that of a non-treated LED structure. The transmittance of the roughened LED structure (10.5%) was lower than that of a non-treated LED structure (20.3%) at 447nm because the incident light was mostly reflected and scattered by the patterned-sapphire structure and by the roughened structure at the GaN/sapphire interface. The light emission intensity in the laser-treated striped region, with the roughened N-face GaN surface was higher than that in the non-treated patterned sapphire region. The InGaN structure with the roughened inverted pyramidal structure increased the light extraction efficiency of nitride-based LEDs.Gallium nitride materials have attracted much interest in the development of optoelectronic devices such as white light-emitting diodes 1 (LEDs) and laser diodes. Nevertheless, bright blue LEDs require higher internal and external quantum efficiencies. The low external quantum efficiency of InGaN-based LEDs is caused by the large difference between the refractive indexes of the GaN layer and the surrounding air ( n∼1.5). Bottom-patterned Al 2 O 3 substrates, 2 roughened p-type GaN:Mg surface, 3 the formation of photonic crystal structures, 4 amorphous titanium oxide films with porous structures and a graded refractive-index, 5 two-floor air prism arrays as embedded reflectors, 6 overcut side-holes that are formed by wet etching, 7 and anisotropically etched GaN-sapphire interfaces, 8 have all been utilized to increase the light-extraction efficiency of InGaN-based LEDs on Al 2 O 3 substrates. Fujii et al. 9 reported that a laser-lift-off technique that was followed by an anisotropic etching process to roughen the surface of an n-side-up GaN-based LED with a hexagonal ''conelike'' surface, increased extraction efficiency. Structures of InGaN-based LEDs that promote light extraction have also been formed using pulselaser fabrication processes. 10-13 Lee et al. 14 increased the output power of an InGaN-based LED by reducing both the thermal damage to the sapphire substrate, along with the consequently formed debris, using femtosecond laser scribing.In this work, roughened inverted-pyramidal structures of InGaN LEDs were observed at the top and the bottom of the patternedsapphire substrate via a laser decomposition process and a wet etching process. The InGaN LED structure comprised a patterned sapphire substrate and a roughened structure that increased light extraction efficiency. A roughened N-face GaN surface was formed for high light extraction without using a conventional laser lift-off process. The optical properties, light-extraction efficiency, and far-field radiation pattern of the laser-treated LED structures were analyzed in detail.
ExperimentalInGaN-based LED structures w...