Inherently Robust Micromachined Gyroscopes with 2-DOF Sense-Mode Oscillator

Acar, Cenk; Shkel, Andrei M.; Costlow, L.E.; Madni, A.M.

doi:10.1109/icsens.2005.1597786

Cited by 30 publications

(42 citation statements)

References 10 publications

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“…Even when the designed devices have driving electrodes in both sides [2]. This occurs when the same driving voltage (phase-shifted) is used on both sides, just to increase the driving force [27].…”

Section: One-sided Actuation Limitationsmentioning

confidence: 99%

Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated MEMS resonators

Fargas-Marques

Costa‐Castelló

2017

Nonlinear Dyn

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Electrostatic parallel-plate actuators are a common way of actuating microelectromechanical systems, both statically and dynamically. Nevertheless, actuation voltages and oscillations are limited by the nonlinearity of the actuator that leads to the Pull-in phenomena. This work presents a new approach to obtain the electrostatic parallel-plate actuation voltage, which allows to freely select the desired frequency and amplitude of oscillation. Harmonic Balance analysis is used to determine the needed actuation voltage and to choose the most energy efficient actuation frequency. Moreover, a new two-sided actuation approach is presented that allows to actuate the device in all the stable range using the Harmonic Balance Voltage.

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Section: One-sided Actuation Limitationsmentioning

confidence: 99%

Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated MEMS resonators

Fargas-Marques

Costa‐Castelló

2017

Nonlinear Dyn

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“…Xiong et al reported a "slots gyroscope" [4] with -factors of 100 and a tuning fork gyroscope [5] with -factors of nearly 1000, but no further results about resolution and bias stability were reported. Acar et al proposed a robust micromachined gyroscope with a 2-DOF sense-mode oscillator and a measured noise floor of 0.64 [6]. Alper et al reported a high-performance SOI (silicon on insulator)-MEMS gyroscope with a measured noise equivalent rate of 90 and bias stability of 1.5 for 100 s [7], and in another publication a gyroscope with a resolution of 0.030 in 50 Hz bandwidth [8]; the latter device has a similar mechanical design to the device described in this work, but with a structural thickness of only 12-15 um.…”

Section: Icroelectromechanical Systems (Mems)mentioning

confidence: 99%

A High-Resolution Silicon-on-Glass $Z$ Axis Gyroscope Operating at Atmospheric Pressure

et al. 2010

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Abstract-This paper describes a high-resolution silicon-onglass axis gyroscope operating at atmospheric pressure. The mechanical structure is designed in such a way that it exhibits low cross coupling between drive and sense mode of less than 0.5% simulated using finite-element method and 1.35% verified by experimental measurements. Due to a symmetrically designed structure, the specified bandwidth can be maintained despite of fabrication imperfections. The fabrication process flow is based on a combination of silicon on glass bonding and deep reactive ion etching which results in a large proof mass and capacitances. A closed loop self-oscillation drive interface is used to resonate the gyroscope in the drive mode, which reaches steady-state after 150 ms. Using area-varying capacitors, large quality factors of 217 and 97 for drive and sense mode, respectively, were achieved operating at atmospheric pressure. A low drive voltage, with a 1 V peak-peak

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“…If both the drive and sense mode have the same resonant frequencies, the rotation induced Coriolis force excites the system into resonance in the secondary sense direction and the sensor output increases at the cost of reduced mechanical bandwidth (Acar et al 2005). However, achieving resonance in both drive and sense modes becomes extremely difficult in the presence of environmental variations and fabrication imperfections, induced due to tolerance capabilities of the current photolithography processes and microfabrication techniques.…”

Section: Introductionmentioning

confidence: 99%

Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances

Saleem

Bazaz

2011

Microsyst Technol

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This paper presents design of a structurally decoupled 3-DoF non-resonant MEMS gyroscope with increased robustness and gain. The proposed design utilizes dynamic amplification in 2-DoF drive mode oscillator to achieve large gain. The device performance is verified through behavioral model simulations considering the fabrication limitations of standard electroplated nickel micromachining process, MetalMUMPs, of 20 lm structural layer thickness. A wide operational bandwidth of 1.74 kHz with dynamically amplified again of 0.2 lm is achieved at low actuation voltages. A design sensitivity and Monte Carlo analysis is carried out to show the robustness of the design, without any feedback control, within the fabrication process tolerances. Moreover to verify the device performance under the application of angular velocity, a rate table characterization is carried out which resulted in sense mass displacement of 30 nm corresponding to the rotation induced Coriolis force at actuation voltage of 20 V ac and 30 V dc with angular rotation of 50 rad/s. Behavioral model simulations proved to be an cost-effective and time-saving alternative to the traditional iterative fabrications and physical level simulations.

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Inherently Robust Micromachined Gyroscopes with 2-DOF Sense-Mode Oscillator

Cited by 30 publications

References 10 publications

Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated MEMS resonators

Energy-efficient full-range oscillation analysis of parallel-plate electrostatically actuated MEMS resonators

A High-Resolution Silicon-on-Glass $Z$ Axis Gyroscope Operating at Atmospheric Pressure

Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances

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