Integrated piezoelectric micromechanical vibration platform for six degree of freedom motion

Qin, Feng; Gong, Dongdong; Chen, Yu; Li, Xiaoshi; Bao, Jingfu; Wang, Yicheng; Sun, Xiangyu

doi:10.1088/1361-6439/ab3b17

Cited by 9 publications

(4 citation statements)

References 31 publications

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“…Based on the multi-axis distributed-electrode excitation of PZT/Si unimorph T-beams, a 6-DOF piezoelectric microvibratory stage was proposed, [196] which achieved linear strokes larger than AE7.5 μm, rotary angles larger than AE0.5°, and the first resonant frequency of 900 Hz. Qin et al proposed a 6-DOF piezoelectric micromechanical vibration platform, [197] which was constructed by four folded beams and excited by 32 partitioned electrodes based on PZT film; the damping and fatigue experiments verified that the proposed platform possessed large driving capability and good stability in inertial measurement units. Lee et al proposed a flat-type 6-DOF piezoelectric stage for positioning error compensation in the optical measurement system, [198] which achieved the linear and angular resolution of 0.02 μm and 0.1 arcsec, respectively.…”

Section: Zesch Et Al Proposed a Piezoelectricmentioning

confidence: 99%

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Chang,

Chen,

Zhang

et al. 2024

Advanced Intelligent Systems

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Piezoelectric actuation technology has been widely used in various precise‐oriented fields. Its notable advantages include high resolution, rapid response speed, output force with high density, and immunity to electromagnetic interference. Characteristics of cross‐scale and multiple‐degree‐of‐freedom (multi‐DOF) output motions are of utmost importance in the context of micro‐/nanopositioning technology. For decades, researchers have been working to develop various piezoelectric devices that exploit these important properties. In this review, a comprehensive review of recent research efforts in the field of cross‐scale multi‐DOF piezoelectric drive technology is provided. To commence, it provides an in‐depth exploration of the unique advantages associated with piezoelectric actuation, demonstrating them through comparative analyses with alternative actuation methods. Subsequently, the complexity of piezoelectric cross‐scale motion is introduced, and the multi‐DOF piezoelectric motion is classified in detail. Furthermore, the practical applications of multi‐DOF cross‐scale piezoelectric actuation technology are systematically elucidated, highlighting its versatility and suitability in real‐world environments. Finally, an in‐depth discussion that addresses the challenges encountered in the field is provided, and the prospective directions for further developments in piezoelectric actuation technology are outlined. This scholarly contribution plays an important role in guiding future research and innovative initiatives.

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Section: Zesch Et Al Proposed a Piezoelectricmentioning

confidence: 99%

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Chang,

Chen,

Zhang

et al. 2024

Advanced Intelligent Systems

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“…However, in some special application scenarios, e.g., space and underwater, this recalibration may be impracticable. In previous studies, a micro-vibration platform based on piezoelectric materials has been developed to realize calibration in the field for inertial sensors [ 23 , 24 , 25 ]. Based on the micro-vibration platform, Li proposed a system that integrates an optical detection sensor for the calibration of accelerometers [ 26 ].…”

Section: Introductionmentioning

confidence: 99%

A Scale Factor Calibration Method for MEMS Resonant Accelerometers Based on Virtual Accelerations

Zhai

Xiong

et al. 2023

Micromachines

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This paper presents a scale factor calibration method based on virtual accelerations generated by electrostatic force. This method uses a series of voltage signals to simulate the inertial forces caused by the acceleration input, rather than frequent and laborious calibrations with high-precision instruments. The error transfer model of this method is systematically analyzed, and the geometrical parameters of this novel micromachined resonant accelerometer (MRA) are optimized. The experimental results demonstrate that, referring to the traditional earth’s gravitational field tumble calibration method, the error of the scale factor calibration is 0.46% within ±1 g by using our method. Moreover, the scale factor is compensated by virtual accelerations. After compensation, the maximum temperature drift of the scale factor decreases from 2.46 Hz/g to 1.02 Hz/g, with a temperature range from 40 °C to 80 °C.

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“…Traditionally, microstages have been realized as macroscale devices, but advances in microelectromechanical systems (MEMSs) fabrication techniques have allowed for the development of microscale microstages. Several actuation mechanisms have been utilized to drive MEMS-based micropositioning stages, such as shape memory alloy [5], piezoelectric [6], electrostatic [7], electromagnetic [8], electrothermal [9], and electroactive polymers [10]. However, micropositioning stages that utilize such actuation methods (piezoelectric actuation in most high-precision cases) require a complex and expensive fabrication process that is not suitable for batch fabrication [11,12].…”

Section: Introductionmentioning

confidence: 99%

Development of 4D-printed shape memory polymer large-stroke XY micropositioning stages

Cheah

Alshebly

Ali

et al. 2022

J. Micromech. Microeng.

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This paper presents two novel large-stroke XY micropositioning stages that are fabricated completely using four-dimensional (4D) printed polylactic acid (PLA). The proposed designs do not require manual training to perform actuation. Instead, printing speed is used to achieve shape programming and manipulate the deformation and shrinking levels of the PLA microactuators that control the microstage. A relationship between the printing speed, number of layers, and deformation value is formulated to model the performance of the microactuators based on these variables. The same approach is then used to develop the two proposed designs in this work. Actuations in the x- and y-axes are achieved using PLA actuators that are printed at speeds in the range of 40 – 80 mm/s, while the rest of the structure (passive part) is printed at a speed of 10 mm/s to minimize unwanted deformations. The microactuators are activated by immersing the designs in hot water at 85 °C. The maximum values of the x- and y-actuations are achieved when using the highest printing speed for the microactuators. Design 1 offers actuation values of 1.99 and 1.40 mm along the x- and y-axes, respectively, while these values are 1.76 and 2.30 mm when using Design 2. The proposed designs offer a cost-effective batch fabrication solution for micropositioning applications, where the weight of the PLA required for Design 1 and Design 2 is 48.37 g and 12.61 g, respectively, which respectively costs $0.65 and $0.17. In addition, the designs offer a promising performance compared to the currently available large-stroke micropositioning stages in terms of the simplicity of the fabrication process and the area ratio.

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Integrated piezoelectric micromechanical vibration platform for six degree of freedom motion

Cited by 9 publications

References 31 publications

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

A Scale Factor Calibration Method for MEMS Resonant Accelerometers Based on Virtual Accelerations

Development of 4D-printed shape memory polymer large-stroke XY micropositioning stages

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