Integrated sensor cross-sensitivity analysis

Abstract

We present data and analysis of sensor crosssensitivities to a range of environmental conditions: temperature, humidity, light intensity, air flow, magnetic field, and acceleration. We used previously developed multifunctional integrated sensors (MFISes) with ten functions on a single chip as the test platform. We quantify the effect of test conditions on sensor offset and sensitivity, examine the fundamental mechanisms of the cross-sensitivities, and compare the performance of different transduction principles. The data and analysis is key to enabling the use of multifunctional sensors and is applicable to general sensor design and operation.