Integrated Solutions to Decrease Micro-Fluxgate Sensors Noise

Joisten, Hélène; Guilhamat, B.; Audoin, M.; Cuchet, R.; Léger, Jean‐Michel; Desloges, B.; Gaud, P.

doi:10.1109/tmag.2004.832482

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“…The various noise sources have been modeled and their power spectral density estimated from the experimental results. Similar work was performed by Joisten et al (2004). The latest study reported the dc and ac magnetic field dependence of the low-frequency noise in a MEMS flux concentrator device containing a giant magnetoresistance spin valve (Ozbay et al 2006, Edelstein et al 2006.…”

Section: Magnetic Memssupporting

confidence: 61%

Noise in MEMS

Mohd-Yasin

Nagel

Korman

2009

Meas. Sci. Technol.

129

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This review provides a comprehensive recap of noise research in MEMS. Some background on noise and on MEMS is provided. We review noise production mechanisms, and highlight work on the theory and modeling of noise in MEMS. Then noise measurements in the specific types of MEMS are reviewed. Inertial MEMS (accelerometers and angular rate sensors), pressure and acoustic sensors, optical MEMS, RF MEMS, surface acoustic wave devices, flow sensors, and chemical and biological MEMS, as well as data storage devices and magnetic MEMS, are reviewed. We indicate opportunities for additional experimental and computational research on noise in MEMS.

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Section: Magnetic Memssupporting

confidence: 61%