2022
DOI: 10.1016/j.apsusc.2021.152248
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Interface optimization of La-based gate dielectric for molybdenum disulfide field-effect transistors

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Cited by 5 publications
(4 citation statements)
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“…5(g) compares the mobility of our device with n-type MoS 2 FETs reported previously. 28,33–56 It is worth noting that the local 1T structural phase transition is an effective approach for coordinately improving both the intrinsic transport and contact properties to achieve high-speed and low-power MoS 2 FETs.…”
Section: Resultsmentioning
confidence: 99%
“…5(g) compares the mobility of our device with n-type MoS 2 FETs reported previously. 28,33–56 It is worth noting that the local 1T structural phase transition is an effective approach for coordinately improving both the intrinsic transport and contact properties to achieve high-speed and low-power MoS 2 FETs.…”
Section: Resultsmentioning
confidence: 99%
“…In addition, the roughness was characterized by root-mean-square surface roughness of 1.14 nm for an area of 20 μm × 20 μm, as shown in figure S3. The Hf 0.95 Al 0.05 O gate dielectric with a flat surface can effectively reduce the leakage current and enhance the performance of phototransistors [26,27].…”
Section: Methodsmentioning
confidence: 99%
“…For material optimization, the purpose of optimizing the characteristics of the field effect tube is generally reached by improving the material processing process or proposing novel materials. For example, in 2022, a method to improve the contact condition at the interface of molybdenum disulfide by oxygen plasma treatment was proposed, in which the state of molybdenum dioxide was altered by the oxygen plasma treatment process, and the generated layer of molybdenum trioxide was utilized to protect the molybdenum dioxide while removing the organic impurities at the interface, thereby improving the device performance [8].…”
Section: Optimization Of Field Effect Tubesmentioning
confidence: 99%