Interference microscope-profilometer

Сысоев, Е. В.; Vykhristyuk, I. A.; Kulikov, R. V.; Potashnikov, A. K.; Razum, V. A.; Stepnov, L. M.

doi:10.3103/s8756699010020111

Cited by 4 publications

(5 citation statements)

References 5 publications

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“…6 shows experimental setup where measurements were carried out. The main part of this installation was the optical interference microscope MNP-1 [6]. An additional optical registration channel with the photodiode FD256 as well as an additional light source -Linos HeNe laser were added in the interferometer of MNP-1.…”

Section: Experiments Description and Resultsmentioning

confidence: 99%

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Application of 3D Nanorelief Sharp-Edge Detection Method in the Optical Interference Microscope

Сысоев

Chugui

Kulikov

et al. 2017

AMM

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As is well known, the phase-shifting interferometry techniques allow to reach longitudinal resolution to ~ 0.1 nm, but the value of lateral resolution remains at the level of ~ 1 mm. For providing of high lateral resolution of linear measurements in the interference microscope profilometer it was proposed to use a position detection sensor of sharp edge. Principle of sensor’s measurement is based on registration of laser spot intensity scattered by the measurement sample surface under displacement of sample in the lateral direction. The paper shows the prototype scheme of measurement system containing the Linnik interferometer used for surface nanorelief measurement and a position detection module of sharp edge. Measurement process and experimental results are presented. The combining of measurement results performed by the Linnik interferometer and a position detection sensor of sharp edge can allow us to precisely (better then diffraction limit) define the position of sharp edge on the reconstructed surface nanorelief.

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Section: Experiments Description and Resultsmentioning

confidence: 99%

“…In the paper, we proposed in a common scheme to combine the optical interference microscope [6] and a position detection sensor of sharp edge. This can significantly improve the accuracy of determining the position of a sharp edge with respect to the measured surface relief.…”

Section: Introductionmentioning

confidence: 99%

Application of 3D Nanorelief Sharp-Edge Detection Method in the Optical Interference Microscope

Сысоев

Chugui

Kulikov

et al. 2017

AMM

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“…Measurements were carried out on an interference microscope MNP-1 [7] by the method of partially scanning correlogram. A silicon sample with nanostructure on the surface was used as a measurement object.…”

Section: Full-scale Experiments Resultsmentioning

confidence: 99%

Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer

Сысоев¹,

Kulikov

Vykhristyuk³

et al. 2015

Measurement Science Review

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In scanning interferometry of longitudinal shift, an uncertainty of required phase shift performance leads to a measurement error. Such uncertainty can be caused by external factors (vibrations, air turbulence in measuring area etc.) as well as inaccuracy of the scanning system. The method for calculating the phase shift between interferograms, which allows reducing the measurement error, is proposed. The results of numerical and full scale experiments are presented.

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“…This sample was created by the technique described in [13,14]. Relief measurement was performed by low-coherent interference microscope MNP-1 [15] using method of partially corelogramm scanning [16]. Fig.…”

Section: Optical Experimentsmentioning

confidence: 99%

Improvement of Lateral Resolution of 3D-Relief Interferometric Measurement by Deconvolution

Сысоев

Vykhristyuk

Широков

et al. 2017

AMM

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Interference microscope-profilometer

Cited by 4 publications

References 5 publications

Application of 3D Nanorelief Sharp-Edge Detection Method in the Optical Interference Microscope

Application of 3D Nanorelief Sharp-Edge Detection Method in the Optical Interference Microscope

Correction of Scanning Steps to Improve Accuracy in Interferometric Profilometer

Improvement of Lateral Resolution of 3D-Relief Interferometric Measurement by Deconvolution

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