2003
DOI: 10.1063/1.1635985
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Intersubband spectroscopy of doped and undoped GaN/AlN quantum wells grown by molecular-beam epitaxy

Abstract: Structural and vibrational properties of molecular beam epitaxy grown cubic (Al, Ga)N/GaN heterostructures

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Cited by 86 publications
(61 citation statements)
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“…7,8 Unfortunately, the heavy effective masses of 0.2 m e for GaN and 0.32 m e for AlN impose the epitaxial growth of layer thicknesses in the 15-30 Å range, which, despite substantial progress in molecular beam epitaxy, is still quite a challenging task. 9 Nevertheless, intersubband absorption down to 1.06 m has been shown in heavily doped, ultrathin GaN quantum wells which were separated by barriers of either AlGaN, pure AlN, or AlN/GaN superlattices. 10,11 In the majority of these experiments, the observed effects were purely optical and, except for one report, no vertical current transport could be demonstrated.…”
mentioning
confidence: 99%
“…7,8 Unfortunately, the heavy effective masses of 0.2 m e for GaN and 0.32 m e for AlN impose the epitaxial growth of layer thicknesses in the 15-30 Å range, which, despite substantial progress in molecular beam epitaxy, is still quite a challenging task. 9 Nevertheless, intersubband absorption down to 1.06 m has been shown in heavily doped, ultrathin GaN quantum wells which were separated by barriers of either AlGaN, pure AlN, or AlN/GaN superlattices. 10,11 In the majority of these experiments, the observed effects were purely optical and, except for one report, no vertical current transport could be demonstrated.…”
mentioning
confidence: 99%
“…There are several studies of intersubband absorption in AlN/GaN heterostructures. [1][2][3][4][5][6] These typically show a peak at 500 to 900 meV with full width half maximum (FWHM) in the range of 60 to 200 meV. An intersubband device should operate at and above 300 K, often with the condition of a negligible change in transition energy.…”
mentioning
confidence: 99%
“…Furthermore, in situ monitorization of the surface morphology by reflection high energy electron diffraction (RHEED) makes possible to control the growth at the atomic layer scale. Room temperature ISB absorption at λ ≈ 1.3−1.55 has been demonstrated in both QW [4][5][6][7][8] and QD superlattices [9][10][11], and several prototypes of ISB detectors [12][13][14][15] and electro-optical modulators [16] have recently been reported. These developments are possible thanks to improved deposition techniques for Al(Ga)N/GaN layers and superlattices [17][18][19].…”
Section: Introductionmentioning
confidence: 99%