Introduction: Glancing Angle Deposition Technology

Hawkeye, Matthew M.; Taschuk, Michael T.; Brett, Michael

doi:10.1002/9781118847510.ch1

Cited by 7 publications

(1 citation statement)

References 177 publications

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“…Thin film growth by physical vapor deposition methods such as electron beam, ion-beam evaporation, or magnetron sputtering in glancing angle deposition (GLAD) geometry can be used to fabricate fancy porous microstructured thin films. Several reviews have been written on this topic focusing either on the physics of the deposition process [1,2] or the optical performance [3,4] and other potential applications of the deposited porous materials [5,6].…”

Section: Introductionmentioning

confidence: 99%

Vapor and liquid optical monitoring with sculptured Bragg microcavities

et al. 2017

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Sculptured porous Bragg Microcavities (BMs) formed by the successive stacking of columnar SiO2 and TiO2 thin films with a zig-zag columnar microstructure are prepared by glancing angle deposition. These BMs act as wavelength dependent optical retarders. This optical behavior is attributed to a self-structuration of the stacked layers involving the lateral association of nanocolumns in the direction perpendicular to the main flux of particles during the multilayer film growth, as observed by Focused Ion Beam Scanning Electron Microscopy. The retardance of these optically active BMs can be modulated by dynamic infiltration of their open porosity with vapors, liquids or solutions with different refractive indices. The tunable birefringence of these nanostructured photonic systems have been successfully simulated with a simple model that assumes that each layer within the BMs stack has uniaxial birefringence. The sculptured BM have been incorporated as microfluidic chips for optical transduction for label free vapor and liquid 2 sensing. Several examples of the detection performance of these chips, working either in reflection or transmission configuration, for the optical monitoring of vapor and liquids of different refractive index and aqueous solutions of glucose flowing through the microfluidic chips are described.

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